SCOPUS 정보 검색 플랫폼

Advanced Materials Research

Volumn 383-390, Issue , 2012, Pages 3298-3304

Effect of hydrogen on the properties of amorphous carbon nitride films

(5) Mikmeková, Eliška a Urbánek, Michal a Fořt, Tomáš a Di Mundo, Rosa b Caha, Ondřej c

a INSTITUTE OF SCIENTIFIC INSTRUMENTS (Czech Republic)

b UNIVERSITY OF BARI (Italy)

c MASARYK UNIVERSITY (Czech Republic)

Author keywords

AFM; Hydrogenated a CNx films; R.F. Magnetron sputtering; Residual stress; SLEEM; TDMS; XPS

Indexed keywords

AFM; AMORPHOUS CARBON NITRIDE FILMS; EFFECT OF HYDROGEN; LOW ENERGY ELECTRON MICROSCOPY; MAGNETRON SPUTTERING DEVICE; NITROGEN CONTENT; NITROGEN DISCHARGES; R.F. MAGNETRON SPUTTERING; SI SUBSTRATES; SLEEM; TDMS; THERMAL DESORPTION MASS SPECTROSCOPIES;

AMORPHOUS CARBON; AMORPHOUS SILICON; ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; CARBON FILMS; CARBON NITRIDE; COPPER; HYDROGEN; MANUFACTURE; MASS SPECTROMETRY; RESIDUAL STRESSES; TECHNOLOGY; THERMAL DESORPTION; X RAY PHOTOELECTRON SPECTROSCOPY; X RAY TUBES;

AMORPHOUS FILMS;

EID: 83755174023 PISSN: 10226680 EISSN: None Source Type: Book Series
DOI: 10.4028/www.scientific.net/AMR.383-390.3298 Document Type: Conference Paper

Times cited : (2)

References (17)

1
- 0346974565
- J. Robertson, Prog. Solid State Chem. 21 (1991) 199.
- (1991) Prog. Solid State Chem. , vol.21 , pp. 199
- Robertson, J.¹

2
- 0142159473
- Cambridge University Press
- L.B. Freund, S. Suresh, Thin Film Materials, Cambridge University Press, 2009.
- (2009) Thin Film Materials
- Freund, L.B.¹ Suresh, S.²

3
- 0035880208
- X. Zhang, K.Z. Chen, R. Ghodssi, A.A. Ayon, S.M. Spearing, Sensors and Actuators 91, 373-380, 2001.
- (2001) Sensors and Actuators , vol.91 , pp. 373-380
- Zhang, X.¹ Chen, K.Z.² Ghodssi, R.³ Ayon, A.A.⁴ Spearing, S.M.⁵

4
- 0001470087
- N. Hellgren, K. Macak, E. Broitman, M.P. Johansson, L. Hultman, J.-E. Sundgren, J. Appl. Phys. 88 (2000) 524.
- (2000) J. Appl. Phys. , vol.88 , pp. 524
- Hellgren, N.¹ Macak, K.² Broitman, E.³ Johansson, M.P.⁴ Hultman, L.⁵ Sundgren, J.-E.⁶

5
- 3142714896
- S. Logotheditis, M. Gioti, P. Patsalas, C. Charitidis, Carbon 9 (375) (2001) 1179.
- (2001) Carbon , vol.9 , Issue.375 , pp. 1179
- Logotheditis, S.¹ Gioti, M.² Patsalas, P.³ Charitidis, C.⁴

6
- 20444373328
- A.Y. Liu, M.L. Cohen, Science 245 (1989) 841.
- (1989) Science , vol.245 , pp. 841
- Liu, A.Y.¹ Cohen, M.L.²

7
- 0342945364
- H. Sjöström, S. Stafström, e. Broman, J.-E. Sundren, Phys. Rev. Lett. B 75 (1995) 1336.
- (1995) Phys. Rev. Lett. B , vol.75 , pp. 1336
- Sjöström, H.¹ Stafström, S.² Broman, J.-E.³ Sundren⁴

8
- 0242611567
- M. Theresse, M. Benlahsen, Solid State Comminications 129 (2004) 139-142.
- (2004) Solid State Comminications , vol.129 , pp. 139-142
- Theresse, M.¹ Benlahsen, M.²

9
- 67650506782
- S. Peponas, M. Guedda, M. Benlahsen, applied Surface Science 255 (2009) 8706-8709.
- (2009) Applied Surface Science , vol.255 , pp. 8706-8709
- Peponas, S.¹ Guedda, M.² Benlahsen, M.³

10
- 0032692055
- S. Muhl, J.M. Mendez, Diamond Relat. Mater. 8 (1999) 1809.
- (1999) Diamond Relat. Mater. , vol.8 , pp. 1809
- Muhl, S.¹ Mendez, J.M.²

11
- 0035386406
- J. Sobota, G. Sorensen, H. Jensen, Z. Bochníček, V. Holý, Surfaces and coating technology, Volume 142, 590-595, 2001.
- (2001) Surfaces and Coating Technology , vol.142 , pp. 590-595
- Sobota, J.¹ Sorensen, G.² Jensen, H.³ Bochníček, Z.⁴ Holý, V.⁵

12
- 36648999797
- J.H. Van Helden, P.J. Van den Oever, M.W: Kessels, M.C. Van De Sanden, D.C. Schram, R.J. Engeln, Phys. Chem. A. 111 (2007), 11460-72
- (2007) Phys. Chem. A , vol.111 , pp. 11460-11472
- Van Helden, J.H.¹ Van Den Oever, P.J.² Kessels, M.W.³ Van De Sanden, M.C.⁴ Schram, D.C.⁵ Engeln, R.J.⁶

13
- 83755201339
- M. Lejeune, M. Benlahsen, Diamond and Related Materials 17 (2008)
- (2008) Diamond and Related Materials , vol.17
- Lejeune, M.¹ Benlahsen, M.²

14
- 83755226298
- L. Carbonell, G. Vereecke, S. Van Elshocht, M. Caymax, M. Van Hove, K. Maex, P.W. Mertens, Electrochemical Society Proceedings, Volume 2003-3
- (2003) Electrochemical Society Proceedings , Issue.3
- Carbonell, L.¹ Vereecke, G.² Van Elshocht, S.³ Caymax, M.⁴ Van Hove, M.⁵ Maex, K.⁶ Mertens, P.W.⁷

15
- 9744250308
- O. Durand-Drouhin, M. Benlahsen, M. Clin, K. Zellama, Diamond Relat. Mater. 13 (10) (2004) 1854.
- (2004) Diamond Relat. Mater. , vol.13 , Issue.10 , pp. 1854
- Durand-Drouhin, O.¹ Benlahsen, M.² Clin, M.³ Zellama, K.⁴

16
- 0142011478
- M. Lejeune, O. Durand-Drouhin, S. Charvet, A. Grosman, C. Ortega, M. Benlahsen, Thin solid Films (444) (2003) 1.
- (2003) Thin Solid Films , Issue.444 , pp. 1
- Lejeune, M.¹ Durand-Drouhin, O.² Charvet, S.³ Grosman, A.⁴ Ortega, C.⁵ Benlahsen, M.⁶

17
- 11444265028
- I. Müllerová, L. Frank, Advances in Imaging and Electron Physics, Volume 128 (2003), 309-443
- (2003) Advances in Imaging and Electron Physics , vol.128 , pp. 309-443
- Müllerová, I.¹ Frank, L.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.