Laser ablation of silicon using a Bessel-like beam generated by a subwavelength annular aperture structure

Applied Optics

Volumn 50, Issue 34, 2011, Pages 6384-6390

  Yu, Yuh Yan ^a   Chang, Chin Kai ^b   Lai, Ming Wei ^b   Huang, Long Sun ^a   Lee, Chih Kung ^a,c,d  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^c NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^d INSTITUTE FOR INFORMATION INDUSTRY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION; BESSEL FUNCTIONS; LASER ABLATION; LASER BEAMS; METALS; OXIDE FILMS; SILICON; ULTRASHORT PULSES;

ABLATION THRESHOLDS; ANNULAR APERTURES; BESSEL-LIKE BEAMS; FINITE DIFFERENT TIME DOMAIN; FOCUS INTENSITY; OPTICAL PERFORMANCE; SUBMICROMETERS; SURFACE MACHINING;

TIME DOMAIN ANALYSIS;

EID: 83155193108     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.50.006384     Document Type: Article

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