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Applied Physics Letters

Volumn 97, Issue 8, 2010, Pages

High aspect ratio nanochannel machining using single shot femtosecond Bessel beams

(7) Bhuyan, M K a Courvoisier, F a Lacourt, P A a Jacquot, M a Salut, R a Furfaro, L a Dudley, J M a

a UNIVERSITÉ DE FRANCHE COMTÉ (France)

Author keywords

[No Author keywords available]

Indexed keywords

BESSEL BEAM; DIAMETER CHANNELS; FEMTOSECOND LASER ABLATION; FEMTOSECONDS; HIGH ASPECT RATIO; NANO CHANNELS; NANOMETRICS; PROOF OF PRINCIPLES; PULSE ENERGIES; REPRODUCIBILITIES; SINGLE SHOTS; SINGLE-SHOT; THICK MEMBRANES;

ABLATION; BESSEL FUNCTIONS; LASER BEAMS; MACHINING; PULSED LASER APPLICATIONS;

ASPECT RATIO;

EID: 77956193972 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3479419 Document Type: Article

Times cited : (362)

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