-
1
-
-
0031258062
-
Laser ablation and micromachining with ultrashort laser pulses
-
X. Liu, D. Du, and G. Mourrou, "Laser ablation and micromachining with ultrashort laser pulses," IEEE J. Quantum Electron. 33, 1706-1716 (1997).
-
(1997)
IEEE J. Quantum Electron.
, vol.33
, pp. 1706-1716
-
-
Liu, X.1
Du, D.2
Mourrou, G.3
-
2
-
-
0033414039
-
The femtosecond pulse laser: A new tool for micromachining
-
J. Kruger and W. Kautek, "The femtosecond pulse laser: a new tool for micromachining," Laser Phys. 9, 30-40 (1999).
-
(1999)
Laser Phys.
, vol.9
, pp. 30-40
-
-
Kruger, J.1
Kautek, W.2
-
3
-
-
0033364061
-
Micromachining with ultrashort laser pulses
-
Z. Jianxin, H. Bernd, and M. Arnd, "Micromachining with ultrashort laser pulses," in Proc. SPIE 3618, 114-121 (1999).
-
(1999)
Proc. SPIE
, vol.3618
, pp. 114-121
-
-
Jianxin, Z.1
Bernd, H.2
Arnd, M.3
-
4
-
-
0033906138
-
Ultrafast lasers as a versatile processing tool
-
X. Liu, "Ultrafast lasers as a versatile processing tool," in Proc. SPIE 3888, 198-209 (2000).
-
(2000)
Proc. SPIE
, vol.3888
, pp. 198-209
-
-
Liu, X.1
-
5
-
-
0034508051
-
Micromachining with ultrafast lasers
-
K. Shihoyama, A. Furukawa, Ph. Bardo, and A. A. Said, "Micromachining with ultrafast lasers," in Proc. SPIE 4088, 140-143 (2000).
-
(2000)
Proc. SPIE
, vol.4088
, pp. 140-143
-
-
Shihoyama, K.1
Furukawa, A.2
Bardo, Ph.3
Said, A.A.4
-
6
-
-
0002565185
-
Sub-diffraction limited structuring of solid targets with femtosecond laser pulses
-
F. Korte, S. Adams, A. Egbert, C. Fallnich, A. Ostendorf, S. Nolte, M. Will, J. P. Ruske, B. N. Chichkov, and A. Tunnermann, "Sub-diffraction limited structuring of solid targets with femtosecond laser pulses," Opt. Exp. 7, 41-49 (2000).
-
(2000)
Opt. Exp.
, vol.7
, pp. 41-49
-
-
Korte, F.1
Adams, S.2
Egbert, A.3
Fallnich, C.4
Ostendorf, A.5
Nolte, S.6
Will, M.7
Ruske, J.P.8
Chichkov, B.N.9
Tunnermann, A.10
-
7
-
-
0034891839
-
Formation of conical microstructures upon laser evaporation of solids
-
S. I. Dolgaev, S. V. Lavrishev, A. A. Lyalin, A. V. Sirnakin, V. V. Voronov, and G. A. Shafeev, "Formation of conical microstructures upon laser evaporation of solids," Appl. Phys. A 73, 177-181 (2001).
-
(2001)
Appl. Phys. A
, vol.73
, pp. 177-181
-
-
Dolgaev, S.I.1
Lavrishev, S.V.2
Lyalin, A.A.3
Sirnakin, A.V.4
Voronov, V.V.5
Shafeev, G.A.6
-
9
-
-
0012027653
-
Femtosecond laser ablation of silicon-modification thresholds and morphology
-
J. Bonse, S. Baudach, J. Kruger, W. Kautek, and M. Lenzner, "Femtosecond laser ablation of silicon-modification thresholds and morphology," Appl. Phys. A 74, 19-25 (2002).
-
(2002)
Appl. Phys. A
, vol.74
, pp. 19-25
-
-
Bonse, J.1
Baudach, S.2
Kruger, J.3
Kautek, W.4
Lenzner, M.5
-
10
-
-
0031588236
-
Direct writing of silicon with high coherent ultraviolet laser
-
C. Chao, C. Chen, C. Liu, Y. Chang, and C. C. Yang, "Direct writing of silicon with high coherent ultraviolet laser," Appl. Phys. Lett. 71, 2442-2444 (1997).
-
(1997)
Appl. Phys. Lett.
, vol.71
, pp. 2442-2444
-
-
Chao, C.1
Chen, C.2
Liu, C.3
Chang, Y.4
Yang, C.C.5
-
11
-
-
0034831771
-
Submicron micromachining on silicon wafer using femtosecond pulse laser
-
B. K. A. Ngoi, K. Venkatakrishnan, L. E. N. Lim, and B. Tan, "Submicron micromachining on silicon wafer using femtosecond pulse laser" J. Laser Appl. 13, 41-43 (2001).
-
(2001)
J. Laser Appl.
, vol.13
, pp. 41-43
-
-
Ngoi, B.K.A.1
Venkatakrishnan, K.2
Lim, L.E.N.3
Tan, B.4
-
12
-
-
0035362763
-
Effect of energy above laser induced damage thresholds in the micromachining of silicon by femtosecond pulse laser
-
B. K. A. Ngoi, K. Venkatakrishnan, L. E. N. Lim, B. Tan, and L. H. K. Koh, "Effect of energy above laser induced damage thresholds in the micromachining of silicon by femtosecond pulse laser," Opt. Lasers Eng. 35, 361-369 (2001).
-
(2001)
Opt. Lasers Eng.
, vol.35
, pp. 361-369
-
-
Ngoi, B.K.A.1
Venkatakrishnan, K.2
Lim, L.E.N.3
Tan, B.4
Koh, L.H.K.5
-
13
-
-
24144482340
-
Pulse width effect in ultrafast laser processing of materials
-
H. Chien and M. C. Gupta "Pulse width effect in ultrafast laser processing of materials," Appl. Phys. A 81, 1257-1263 (2005).
-
(2005)
Appl. Phys. A
, vol.81
, pp. 1257-1263
-
-
Chien, H.1
Gupta, M.C.2
|