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Volumn 45, Issue 27, 2006, Pages 7137-7143

Optical characteristics of femtosecond laser micromachined periodic structures in Si 〈100〉

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; FREQUENCY DOUBLERS; LASER PULSES; LIGHT POLARIZATION; MICROMACHINING; OPTICAL PROPERTIES;

EID: 33750571430     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.007137     Document Type: Article
Times cited : (6)

References (13)
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  • 2
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  • 3
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    • Micromachining with ultrashort laser pulses
    • Z. Jianxin, H. Bernd, and M. Arnd, "Micromachining with ultrashort laser pulses," in Proc. SPIE 3618, 114-121 (1999).
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    • Jianxin, Z.1    Bernd, H.2    Arnd, M.3
  • 4
    • 0033906138 scopus 로고    scopus 로고
    • Ultrafast lasers as a versatile processing tool
    • X. Liu, "Ultrafast lasers as a versatile processing tool," in Proc. SPIE 3888, 198-209 (2000).
    • (2000) Proc. SPIE , vol.3888 , pp. 198-209
    • Liu, X.1
  • 9
    • 0012027653 scopus 로고    scopus 로고
    • Femtosecond laser ablation of silicon-modification thresholds and morphology
    • J. Bonse, S. Baudach, J. Kruger, W. Kautek, and M. Lenzner, "Femtosecond laser ablation of silicon-modification thresholds and morphology," Appl. Phys. A 74, 19-25 (2002).
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  • 10
    • 0031588236 scopus 로고    scopus 로고
    • Direct writing of silicon with high coherent ultraviolet laser
    • C. Chao, C. Chen, C. Liu, Y. Chang, and C. C. Yang, "Direct writing of silicon with high coherent ultraviolet laser," Appl. Phys. Lett. 71, 2442-2444 (1997).
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    • Chao, C.1    Chen, C.2    Liu, C.3    Chang, Y.4    Yang, C.C.5
  • 11
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    • Submicron micromachining on silicon wafer using femtosecond pulse laser
    • B. K. A. Ngoi, K. Venkatakrishnan, L. E. N. Lim, and B. Tan, "Submicron micromachining on silicon wafer using femtosecond pulse laser" J. Laser Appl. 13, 41-43 (2001).
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  • 12
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.