Microfabrication and drilling using diffraction-free pulsed laser beam generated with axicon lens

JSME International Journal, Series B: Fluids and Thermal Engineering

Volumn 47, Issue 3, 2004, Pages 497-500

  Kohno, Masamichi ^a   Matsuoka, Yoshihiko ^b  

^a Dept of Mechanical Eng Science ^*  (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Diffraction free beam; Drilling; Laser; Microfabrication

Indexed keywords

DIFFRACTION; DRILLING;

LASER DRILLING; MICROFABRICATION; NANOSECOND PULSES; PENETRATION;

LASER BEAMS;

FABRICATION;

EID: 5444222802     PISSN: 13408054     EISSN: None     Source Type: Journal    
DOI: 10.1299/jsmeb.47.497     Document Type: Article

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