Comparison of surface damage under the dry and wet impact: Molecular dynamics simulation

Applied Surface Science

Volumn 258, Issue 5, 2011, Pages 1756-1761

  Chen, Ruling ^a   Liang, Min ^a   Luo, Jianbin ^b   Lei, Hong ^a   Guo, Dan ^b   Hu, Xiao ^c  

^a SHANGHAI UNIVERSITY   (China)

^b TSINGHUA UNIVERSITY   (China)

^c DANFOSS A S   (Denmark)

Author keywords

Crystalline silicon; Dry and wet impact; Energy transfer; Molecular dynamics simulation; Surface damage

Indexed keywords

ENERGY TRANSFER; SILICA; SUBSTRATES; THIN FILMS;

CRYSTALLINE SILICONS; DEFORMATION STAGES; DRY AND WET; DRY AND WET CONDITIONS; MOLECULAR DYNAMICS SIMULATIONS; SILICON SUBSTRATES; SURFACE DAMAGES; THERMAL DISSIPATION;

MOLECULAR DYNAMICS;

EID: 81555213546     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.10.035     Document Type: Article

References (21)

1. J.F. Luo, and D.A. Dornfeld IEEE Trans. Semicond. Manuf. 14 2001 112
2. A. Kubota, H. Mimura, K. Inagaki, Y. Mori, and K. Yamauchi J. Electrochem. Soc. 153 2006 G874
3. Y.Y. Cheng, and C.C. Lee Nucl. Instrum. Methods. Phys. Res. B 267 2009 1428
4. T. Aoki, J. Matsuo, Z. Insepov, and I. Yamada Nucl. Instrum. Methods Phys. Res. B 121 1997 49
5. Z. Insepov, R. Manory, J. Matsuo, and I. Yamada Phys. Rev. B 61 2000 8744
6. Y. Yamaguchi, and J. Gspann Phys. Rev. B 66 2002 155408
7. R.L. Chen, J.B. Luo, D. Guo, and X.C. Lu J. Appl. Phys. 108 2008 104907
8. C.C. Hwang, J.G. Chang, G.J. Huang, and S.H. Huang J. Appl. Phys. 92 2002 5904
9. H. Hensel, and H.M. Urbassek Phys. Rev. B 57 1998 4756
10. T. Aoki, and J. Matsuo Nucl. Instrum. Methods Phys. Res. B 228 2005 46
11. C.Y. Tang, and L.C. Zhang Nanotechnology 16 2005 15
12. R.L. Chen, J.B. Luo, D. Guo, and H. Lei J. Appl. Phys. 108 2010 073521
13. M. Rovere, M.A. Ricci, D. Vellati, and F. Bruni J. Chem. Phys. 108 1998 9859
14. T. Watanabe, H. Fujiwara, and H. Noguchi Jpn. J. Appl. Phys. Part 2 38 1999 L366
15. W.L. Jorgensen, J. Chandrasekhar, J.D. Madura, R.W. Impey, and M.L. Klein J. Chem. Phys. 79 1983 926
16. H.F. Winters, H. Coufal, C.T. Rettner, and D.S. Bethune Phys. Rev. B 41 1990 6240
17. S. Takami, K. Suzuki, M. Kubo, and A. Miyamoto J. Nanopart. Res. 3 2001 213
18. S.P. Ju, and C.I. Weng Appl. Surf. Sci. 193 2002 224
19. D.H. Kim, G.H. Lee, S.Y. Lee, and D.H. Kim J. Cryst. Growth 286 2006 71
20. R.L. Chen, J.B. Luo, D. Guo, and X.C. Lu J. Nanopart. Res. 11 2009 589
21. S.C. Jung, D. Suh, and W.S. Yoon J. Aerosol. Sci. 41 2010 745