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Volumn 228, Issue 1-4 SPEC. ISS., 2005, Pages 46-50
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Molecular dynamics simulations of sequential cluster ion impacts
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Author keywords
Gas cluster ion beam; Molecular dynamics; Surface morphology; Surface smoothing
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Indexed keywords
GAS CLUSTER ION BEAMS;
MOLECULAR DYNAMICS SIMULATION;
NANOSCALE MODIFICATIONS;
SURFACE SMOOTHING;
ARGON;
COMPUTER SIMULATION;
DEFORMATION;
ETCHING;
ION BOMBARDMENT;
MOLECULAR DYNAMICS;
MORPHOLOGY;
SURFACE ROUGHNESS;
ION BEAMS;
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EID: 11444270018
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.nimb.2004.10.021 Document Type: Conference Paper |
Times cited : (19)
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References (9)
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