Molecular dynamics simulation of damage formation by cluster ion impact

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 121, Issue 1-4, 1997, Pages 49-52

  Aoki, T ^a   Matsuo, J ^a   Insepov, Z ^a   Yamada, I ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; COMPUTER SIMULATION; IONS; MATHEMATICAL MODELS; MOLECULAR DYNAMICS; RADIATION DAMAGE; SILICON; SURFACE TREATMENT;

CLUSTER ION BEAMS;

ION BOMBARDMENT;

EID: 0031546234     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00698-2     Document Type: Article

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