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Volumn 92, Issue 10, 2002, Pages 5904-5912

Investigation of cluster size and cluster incident energy effect on film surface roughness for ionized cluster beam deposition

(4) Hwang, Chi Chuan a Chang, Jee Gong b Huang, Gwo Jiunn c Huang, Sheng Huang a

a NATIONAL CHENG KUNG UNIVERSITY (Taiwan)

b NATIONAL CENTER FOR HIGH PERFORMANCE COMPUTING (Taiwan)

c SWANSEA UNIVERSITY (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC INTERACTIONS; CLUSTER SIZES; CRITICAL CLUSTER; CRITICAL VALUE; DEPOSITION PROCESS; FINAL STATE; INCIDENT ENERGY; IONIZED CLUSTER BEAM DEPOSITION; MANY-BODY; OPTIMAL VALUES; TIGHT BINDING POTENTIAL;

CHEMICAL MODIFICATION; CLUSTER ANALYSIS; COBALT; COMPUTER SIMULATION; INTERFACE STATES; MAGNETIC DEVICES; MAGNETIC FILMS; MOLECULAR DYNAMICS; OPTIMAL SYSTEMS; SURFACE PROPERTIES; SURFACE ROUGHNESS;

COBALT COMPOUNDS;

EID: 0037113086 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1516615 Document Type: Article

Times cited : (28)

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