Extrusion formation mechanism on silicon surface under the silica cluster impact studied by molecular dynamics simulation

Journal of Applied Physics

Volumn 104, Issue 10, 2008, Pages

  Chen, Ruling ^a   Luo, Jianbin ^a   Guo, Dan ^a   Lu, Xinchun ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; DYNAMICS; EXTRUSION; FORMING; ION BOMBARDMENT; MOLECULAR DYNAMICS; NONMETALS; OXIDES; QUANTUM CHEMISTRY; SEMICONDUCTING SILICON COMPOUNDS; SILICA; SILICON; UNLOADING;

CRITICAL IMPACT VELOCITIES; CRYSTALLOGRAPHIC SLIPS; FORMATION MECHANISMS; INCIDENCE ANGLES; MOLECULAR DYNAMIC SIMULATIONS; MOLECULAR DYNAMICS SIMULATIONS; PHASE TRANSFORMATIONS; PROCESS PARAMETERS; SILICA CLUSTERS; SILICON SURFACES; ULTRAPRECISION MACHINING;

SILICON WAFERS;

EID: 57049089405     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3021458     Document Type: Article

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