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Volumn 23, Issue 7, 2011, Pages 419-434
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MEMS hydrogen gas sensor for the entire concentration range of hydrogen gas
a
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Author keywords
Cantilever; Exothermic reaction; Hydrogen sensor; MEMS; SOI; Thermal conductivity
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Indexed keywords
CANTILEVER;
CONCENTRATION RANGES;
HEAVILY DOPED;
HIGH CONCENTRATION;
HIGH THERMAL CONDUCTIVITY;
HYDROGEN CONCENTRATION;
HYDROGEN GAS;
HYDROGEN GAS CONCENTRATIONS;
HYDROGEN GAS SENSORS;
HYDROGEN SENSOR;
LOW CONCENTRATIONS;
MICROHEATER;
N-TYPE IMPURITIES;
NI FILMS;
NICHROME;
PD FILM;
ROOM TEMPERATURE;
SENSING AREAS;
SILICON-ON-INSULATOR SUBSTRATES;
SOI;
THIN FILM THERMOCOUPLE;
CHEMICAL SENSORS;
CONCENTRATION (PROCESS);
EXOTHERMIC REACTIONS;
GAS DETECTORS;
GASES;
MEMS;
MICROELECTROMECHANICAL DEVICES;
NANOCANTILEVERS;
SILICON ON INSULATOR TECHNOLOGY;
THERMAL CONDUCTIVITY;
THERMAL CONDUCTIVITY OF GASES;
THERMOCOUPLES;
HYDROGEN;
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EID: 81355151644
PISSN: 09144935
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (10)
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References (8)
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