Design and fabrication of high-sensitive chemical sensor system with preconcentration and analysis functions employing a micro cantilever

IEEJ Transactions on Sensors and Micromachines

Volumn 130, Issue 7, 2010, Pages

  Mihara, Takashi ^a   Ikehara, Tsuyoshi ^b   Konno, Mitsuo ^b   Maeda, Ryutaro ^b   Kimura, Mutsumi ^c   Fukawa, Tadashi ^c  

^a OLYMPUS CORPORATION   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c SHINSHU UNIVERSITY   (Japan)

Author keywords

Adsorption tube; Chemical sensor; Mass sensor; Micro cantilever; Polybutadiene

Indexed keywords

ADSORPTION TUBE; ADSORPTION TUBES; MASS SENSOR; MICRO CANTILEVER; MICRO-CANTILEVERS;

ADSORPTION; BUDGET CONTROL; CHEMICAL SENSORS; DESORPTION; ETHANOL; NANOCANTILEVERS; POLYBUTADIENES; RANGE FINDING; TOLUENE;

ATOMIC FORCE MICROSCOPY;

EID: 77955537526     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.130.275     Document Type: Article

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