Characterisation of an irreversible bonding process for COC-COC and COC-PDMS-COC sandwich structures and application to microvalves

Sensors and Actuators, B: Chemical

Volumn 160, Issue 1, 2011, Pages 1473-1480

  Cortese, Barbara ^a   Mowlem, Matt C ^a   Morgan, Hywel ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

Cyclic olefin co polymer (COC); Fabrication; Hybrid device; Microvalves; Silanization; Surface modification

Indexed keywords

AMINOPROPYLTRIETHOXYSILANE; BONDING CONDITIONS; BONDING EFFICIENCY; BONDING PROCESS; BONDING TECHNIQUES; BURST PRESSURES; CYCLIC OLEFINS; FACILE FABRICATION; FLUID CONTROL; FLUIDIC MANIPULATION; GLYCIDOXYPROPYLTRIMETHOXYSILANE; HOT EMBOSSING TECHNIQUE; HYBRID DEVICES; HYDROPHOBIC RECOVERY; INTERFACE EVALUATION; LEAK TESTS; LOW COSTS; LOW TEMPERATURE BONDING; MICRO VALVES; MICRO-FLUIDIC DEVICES; MICROFLUIDIC CHANNEL; NOVEL TECHNIQUES; OXYGEN PLASMAS; PDMS MEMBRANE; POLYDIMETHYLSILOXANE MEMBRANE; SILANIZATION; SURFACE ADHESION; SURFACE CHEMICALS; SURFACE ENERGY MEASUREMENTS; TWO-MATERIALS;

ADHESION; ATOMIC FORCE MICROSCOPY; BIOCOMPATIBILITY; BONDING; CONTACT ANGLE; FABRICATION; FLUIDIC DEVICES; MICROCHANNELS; MICROFLUIDICS; OLEFINS; SCANNING ELECTRON MICROSCOPY; SILICON COMPOUNDS; SURFACE CHEMISTRY; SURFACE PROPERTIES; SURFACE ROUGHNESS; SURFACE TREATMENT; VALVES (MECHANICAL);

SURFACE MORPHOLOGY;

EID: 81155130976     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.07.040     Document Type: Article

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