RF-PACVD of water repellent and protective HMDSO coatings on bell metal surfaces: Correlation between discharge parameters and film properties

Applied Surface Science

Volumn 257, Issue 20, 2011, Pages 8469-8477

  Choudhury, A J ^a   Barve, S A ^b   Chutia, Joyanti ^a   Pal, A R ^a   Kishore, R ^b   Jagannath, ^b   Pande, M ^b   Patil, D S ^b  

^a INSTITUTE OF ADVANCED STUDY IN SCIENCE AND TECHNOLOGY   (India)

^b BHABHA ATOMIC RESEARCH CENTRE   (India)

Author keywords

Corrosion protective coatings; Hexamethyldisiloxane (HMDSO); Hydrophobic coatings; PACVD; Plasma diagnostics; RF plasma

Indexed keywords

BELLS; BIAS VOLTAGE; CHEMICAL ANALYSIS; CHEMICAL PROPERTIES; CORROSION RESISTANCE; CORROSION RESISTANT COATINGS; ELECTRIC DISCHARGES; OPTICAL EMISSION SPECTROSCOPY; PLASMA DIAGNOSTICS; SILICON COMPOUNDS; SURFACE ROUGHNESS; X RAY PHOTOELECTRON SPECTROSCOPY;

HARDNESS AND ELASTIC MODULUS; HEXAMETHYL DISILOXANE; HYDROPHOBIC COATINGS; OPTICAL EMISSION SPECTROSCOPIES (OES); PACVD; PHYSIO-CHEMICAL PROPERTIES; RF PLASMA; X-RAY PHOTOELECTRON SPECTROSCOPY STUDIES;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 80955178354     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.04.134     Document Type: Article

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