Deposition of protective coatings in rf organosilicon discharges

Plasma Sources Science and Technology

Volumn 16, Issue 1, 2007, Pages

  Zajikov L ^a   Burikov V ^a   Kuerov, Z ^a   Franta, D ^a   Dvok, P ^a   Mid R ^a   Peina, V ^b   MacKov, A ^b  

^a MASARYK UNIVERSITY   (Czech Republic)

^b NUCLEAR PHYSICS INSTITUTE   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; DIAMOND LIKE CARBON FILMS; ELASTIC MODULI; POLYCARBONATES; REFRACTIVE INDEX; SILICA;

EXTINCTION COEFFICIENT; FILM HARDNESS; HEXAMETHYLDISILOXANE (HMDSO); ORGANOSILICON DISCHARGES;

PROTECTIVE COATINGS;

EID: 33947663046     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/16/1/S14     Document Type: Conference Paper

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