Tunable patterned ferroelectric parallel-plate varactors for matching network

Solid-State Electronics

Volumn 53, Issue 9, 2009, Pages 993-997

  Zhang, Xiao Yu ^a   Wang, P ^a   Xu, Feng ^a   Ong, C K ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Coplanar waveguide; Parallel plate capacitors; Patterned ferroelectric BST thin film; Tunable impedance matching network

Indexed keywords

BIASED VOLTAGE; BST FILM; BST THIN FILMS; DC BIAS; DC VOLTAGE; IMPEDANCE MATCHING; IMPEDANCE MATCHING NETWORK; INTER-DIGITAL CAPACITORS; MATCHING NETWORKS; PARALLEL PLATES; PARALLEL-PLATE CAPACITORS; PATTERNED FERROELECTRIC BST THIN FILM; PT(111); SI SUBSTRATES; TIO; TUNABILITY; TUNABLE IMPEDANCE MATCHING NETWORK; WIDE FREQUENCY RANGE;

BARIUM; CAPACITANCE; CAPACITORS; COPLANAR WAVEGUIDES; DEPOSITION; ELECTRIC POTENTIAL; FERROELECTRICITY; PLATES (STRUCTURAL COMPONENTS); PLATINUM; PULSED LASER DEPOSITION; THIN FILM DEVICES; THIN FILMS; VARACTORS;

IMPEDANCE MATCHING (ELECTRIC);

EID: 67651122910     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2009.05.002     Document Type: Article

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