Investigation on the dielectric properties of (Ba, Sr)TiO3 thin films on hybrid electrodes

Materials Chemistry and Physics

Volumn 121, Issue 1-2, 2010, Pages 28-31

  Wang, Jinzhao ^a   Zhang, Tianjin ^a   Pan, Runkun ^a   Jiang, Juan ^a   Ma, Zhijun ^a   Xiang, Chao ^a  

^a HUBEI UNIVERSITY   (China)

Author keywords

Dielectric properties; Electrical microscopy; Sputtering; Thin films

Indexed keywords

ATOMIC FORCE MICROSCOPES; BOTTOM ELECTRODES; BST FILM; BST THIN FILMS; DIELECTRIC CONSTANTS; DIELECTRIC MEASUREMENTS; DIELECTRIC TUNABILITY; ELECTRICAL MEASUREMENT; ELECTRICAL MICROSCOPY; HYBRID ELECTRODES; INTERFACIAL DIFFUSION; INTERFACIAL STRUCTURES; LOSS TANGENT; MICRO-ELECTRONIC DEVICES; NUCLEATION AND GROWTH; PT ELECTRODE; RADIO FREQUENCY MAGNETRON SPUTTERING; SI SUBSTRATES; TEM; TIO; TRANSITION LAYERS; TUNABILITIES;

BARIUM; DIELECTRIC PROPERTIES; ELECTRODES; MICROELECTRONICS; PLATINUM; RUTHENIUM ALLOYS; SCANNING ELECTRON MICROSCOPY; SILICON; SILICON COMPOUNDS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

RUTHENIUM COMPOUNDS;

EID: 77949492720     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2009.12.035     Document Type: Article

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