Characterization of ZnO films of surface acoustic-wave oscillators for ultraviolet sensing applications

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 9, Issue 3, 2010, Pages

  Wei, Ching Liang ^a   Chen, Ying Chung ^a   Kao, Kuo Sheng ^b   Wu, Kuang Tsung ^b   Cheng, Da Long ^b   Hsieh, Po Tung ^c  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^b SHU TE UNIVERSITY   (Taiwan)

^c NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

SAW; Ultraviolet sensor; ZnO

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; LITHIUM; METALLIC FILMS; NIOBIUM COMPOUNDS; OSCILLATORS (ELECTRONIC); OXIDE FILMS; SENSORS; ULTRAVIOLET DEVICES;

CHEMICAL COMPOSITIONS; COLPITTS OSCILLATOR CIRCUITS; DEPOSITION TEMPERATURES; FREQUENCY SHIFT; GRAIN SIZE; LITHIUM NIOBATE; SAW DEVICE; SAW OSCILLATORS; SENSING APPLICATIONS; SURFACE ACOUSTIC WAVE DEVICE; ULTRAVIOLET SENSORS; UV SENSOR; ZNO; ZNO FILMS;

ZINC OXIDE;

EID: 80455150401     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.3459938     Document Type: Conference Paper

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