Piezoelectric properties of microfabricated (K,Na)NbO3 thin films

Sensors and Actuators, A: Physical

Volumn 171, Issue 2, 2011, Pages 223-227

  Wakasa, Yu ^a   Kanno, Isaku ^a   Yokokawa, Ryuji ^a   Kotera, Hidetoshi ^a   Shibata, Kenji ^b   Mishima, Tomoyoshi ^b  

^a KYOTO UNIVERSITY   (Japan)

^b HITACHI CABLE LTD   (Japan)

Author keywords

KNN; MEMS; Microfabrication; Piezoelectric; Thin films

Indexed keywords

ELECTRIC FIELD DEPENDENCE; KNN; LEAD-FREE PIEZOELECTRICS; MICRO-CANTILEVERS; MICROFABRICATED; MICROFABRICATION METHODS; PIEZO-ELECTRIC EFFECTS; PIEZOELECTRIC; PIEZOELECTRIC CHARACTERISTICS; PIEZOELECTRIC COEFFICIENT; PIEZOELECTRIC PROPERTY; POTASSIUM NIOBATE; THICK SUBSTRATES; TIP DISPLACEMENT;

COMPOSITE MICROMECHANICS; MICROANALYSIS; MICROFABRICATION; MICROMACHINING; NIOBIUM OXIDE; POTASSIUM; SEMICONDUCTING SILICON COMPOUNDS; SODIUM; THIN FILMS;

PIEZOELECTRICITY;

EID: 80055064372     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.06.018     Document Type: Article

References (20)

1. S. Trolier-McKinstry, and P. Muralt Thin film piezoelectrics for MEMS J. Electroceram. 12 2004 7 17
2. Y. Saito, H. Takao, T. Tani, T. Nonoyama, K. Takatori, T. Homma, T. Nagaya, and M. Nakamura Lead-free piezoceramics Nature 432 2004 84 87
3. T.R. Shrout, and S.J. Zhang Lead-free piezoelectric ceramics: alternatives for PZT? J. Electroceram. 19 2007 111 124
4. 3 thin films by magnetron sputtering Appl. Phys. Lett. 81 2002 337 339
5. 3 thin films prepared by radio frequency magnetron sputtering Appl. Phys. Lett. 94 2009 092902
6. 3 substrate using high-density ceramic targets Jpn. J. Appl. Phys. 43 2004 6627 6631
7. 3/Pt/MgO substrates IEEE Trans. Ultrason. Ferroelectr. Freq. Control. 54 2007 2562 2566
8. 3 films deposited by RF magnetron sputtering Appl. Phys. Express. 1 2008 011511
9. 3 thin films for applications in microelectromechanical system Jpn. J. Appl. Phys. 43 2004 3934 3937
10. 4 inductively coupled plasmas Jpn. J. Appl. Phys. 40 2001 1408 1419
11. 2/Ar plasma Ferroelectrics 357 2007 179 184
12. 3 lead-free piezoceramic microrod arrays by sol-gel processing with micromachined silicon templates J. Am. Ceram. Soc. 91 2008 2844 2847
13. 3 piezoelectric thin films Jpn. J. Appl. Phys. 48 2009 121408
14. M.M. de Lima Jr., R.G. Lacerda, J. Vilcarromero, and F.C. Marques Coefficient of thermal expansion and elastic modulus of thin films J. Appl. Phys. 86 1999 4936 4942
15. J.C. Greenwood Silicon in mechanical sensors J. Phys. E: Sci. Instrum. 21 1988 1114 1128
16. L. Egerton, and D.M. Dillon Piezoelectric and dielectric properties of ceramics in the system potassium-sodium niobate J. Am. Ceram. Soc. 42 1959 438 442
17. H.J. McSkimin, W.L. Bomd, E. Buehler, and G.K. Teal Measurement of the elastic constants of silicon single crystals and their thermal coefficients Phys. Rev. 83 1951 1080
18. J.G. Smits, and W.-S. Choi The constituent equations of piezoelectric heterogeneous bimorphs IEEE Trans. Ultrason. Ferroelectr. Freq. Control 38 1991 256 270
19. I. Kanno, H. Kotera, and K. Wasa Measurement of transverse piezoelectric properties of PZT thin films Sens. Actuators A 107 2003 68 74
20. F. Xu, S. Trolier-McKinstry, W. Ren, B. Xu, Z.-L. Xie, and K.J. Hemker Domain wall motion and its contribution to the dielectric and piezoelectric properties of lead zirconate titanate films J. Appl. Phys. 89 2001 1336 1348