Curie temperature, biaxial elastic modulus, and thermal expansion coefficient of (K, Na)NbO3 piezoelectric thin films

Japanese Journal of Applied Physics

Volumn 48, Issue 12, 2009, Pages

  Shibata, Kenji ^a   Suenaga, Kazufumi ^a   Nomoto, Akira ^a   Mishima, Tomoyoshi ^a  

^a HITACHI CABLE LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC CONSTANTS; FUNDAMENTAL PARAMETERS; FUNDAMENTAL PROPERTIES; LATTICE PARAMETERS; LEAD-FREE PIEZOELECTRIC THIN FILM; MICROELECTROMECHANICAL SYSTEMS; OPTICAL LEVER; PB(ZR ,TI)O; PIEZOELECTRIC THIN FILMS; SI SUBSTRATES; STRESS-INDUCED; TEMPERATURE DEPENDENCE; THERMAL EXPANSION COEFFICIENTS;

CURIE TEMPERATURE; ELASTIC MODULI; LEAD; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRICITY; SODIUM; THERMAL STRESS; THIN FILMS; ZIRCONIUM;

THERMAL EXPANSION;

EID: 75149161346     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.48.121408     Document Type: Article

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