Thin-film thermocouple array for time-resolved local temperature mapping

IEEE Electron Device Letters

Volumn 32, Issue 11, 2011, Pages 1606-1608

  Liu, Haixiao ^a   Sun, Weiqiang ^a   Chen, Qing ^a   Xu, Shengyong ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

Temperature measurement; Temperature sensors; Thermoelectric devices; Thin film thermocouples (TFTCs)

Indexed keywords

JUNCTION AREA; LOCAL TEMPERATURE; RELATIVE STANDARD DEVIATIONS; SOLID SUBSTRATES; TEMPERATURE RESOLUTION; THERMAL DEVICES; THERMAL SENSING; THERMOELECTRIC DEVICES; THIN FILM THERMOCOUPLE; TIME-RESOLVED;

FAILURE ANALYSIS; TEMPERATURE MEASUREMENT; THERMOCOUPLES; THERMOELECTRIC POWER;

TEMPERATURE SENSORS;

EID: 80054968732     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2011.2165522     Document Type: Article

References (15)

1. A. Shakouri, "Nanoscale thermal transport and microrefrigerators on a chip," Proc. IEEE, vol. 94, no. 8, pp. 1613-1638, Aug. 2006. (Pubitemid 46436750)
2. C. C. Williams and H. K. Wickramasinghe, "Scanning thermal profiler," Appl. Phys. Lett., vol. 49, no. 23, pp. 1587-1589, Dec. 1986.
3. J. Christofferson, K. Maize, Y. Ezzahri, J. Shabani, X. Wang, and A. Shakouri, "Microscale and nanoscale thermal characterization techniques," J. Electron. Packag., vol. 130, no. 4, pp. 041 101, Dec. 2008.
4. C. C. Lee and J. Park, "Temperature measurement of visible lightemitting diodes using nematic liquid crystal thermography with laser illumination," IEEE Photon. Technol. Lett., vol. 16, no. 7, pp. 1706-1708, Jul. 2004.
5. B. C. Li, L. Pottier, J. P. Roger, D. Fournier, K. Watarib, and K. Hirao, "Measuring the anisotropic thermal diffusivity of silicon nitride grains by thermoreflectance microscopy," J. Eur. Ceram. Soc., vol. 19, no. 8, pp. 1631-1639, Jun. 1999.
6. J. Altet, W. Claeys, S. Dilhaire, and A. Rubio, "Dynamic surface temperature measurements in ICs," Proc. IEEE, vol. 94, no. 8, pp. 1519-1533, Aug. 2006.
7. J. J. Atherton, M. C. Rosamond, S. Johnstone, and D. A. Zeze, "Thermal characterisation of μL volumes using a thin film thermocouple based sensor," Sens. Actuators A, Phys., vol. 166, no. 1, pp. 34-39, Mar. 2011.
8. A. R. Varrenti, C. L. Zhou, A. G. Klock, S. H. Chyung, J. Y. Long, S. O. Memik, and M. Grayson, "Thermal sensing with lithographically patterned bimetallic thin-film thermocouples," IEEE Electron Dev. Lett., vol. 32, no. 6, pp. 818-820, Jun. 2011.
9. B. Serio, H. Gualous, and J. P. Prenel, "A gold-palladium thin-film microsensor array for thermal imaging of laser beam waists," Sens. Actuators A, Phys., vol. 84, no. 3, pp. 303-309, Sep. 2000.
10. J.-J. Park and M. Taya, "Design of micro-temperature sensor array with thin film thermocouples," J. Electron. Packag., vol. 127, no. 3, pp. 286-289, Sep. 2005. (Pubitemid 41460389)
11. J. Long, A. G. Klock, C. Zhou, S. O. Memik, and M. Grayson, "IOTA: Towards an integrated on-chip thermocouple array," in Proc. 16th THERMINIC, Barcelona, Spain, 2010, pp. 1-6.
12. B. Serio, pp. Nika, and J. P. Prenel, "Static and dynamic calibration of thinfilm thermocouples by means of a laser modulation technique," Rev. Sci. Instrum., vol. 71, no. 11, pp. 4306-4313, Nov. 2000.
13. H. Choi and X. C. Li, "Fabrication and application of micro thin film thermocouples for transient temperature measurement in nanosecond pulsed laser micromachining of nickel," Sens. Actuators A, Phys., vol. 136, no. 1, pp. 118-124, May. 2007. (Pubitemid 46590691)
14. F. J. Blatt, pp. A. Schroeder, C. L. Foiles, and D. Greig, Thermoelectric Power of Metals. New York: Plenum, 1976, pp. 180-181.
15. M. C. Salvadori, A. R. Vaz, F. S. Teixeira, M. Cattani, and I. G. Brown, "Thermoelectric effect in very thin film Pt/Au thermocouples," Appl. Phys. Lett., vol. 88, no. 13, pp. 133 106-1-133 106-3, Mar. 2006.