Three-flat tests including mounting-induced deformations

Optical Engineering

Volumn 46, Issue 9, 2007, Pages

  Griesmann, Ulf ^a   Wang, Quandou ^a   Soons, Johannes ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Absolute flatness measurement; Interferometry; Mounting induced deformations; Three flat test; Uncertainty

Indexed keywords

ABSOLUTE FLATNESS MEASUREMENTS; MIRROR-SYMMETRIC COMPONENTS; MOUNTING-INDUCED DEFORMATIONS; THREE-FLAT TESTS;

ERROR ANALYSIS; INTERFEROMETRY; PROBLEM SOLVING; UNCERTAINTY ANALYSIS; WAVEFRONTS;

OPTICAL TESTING;

EID: 40049084168     PISSN: 00913286     EISSN: 15602303     Source Type: Journal    
DOI: 10.1117/1.2784531     Document Type: Article

References (22)