Optical resolution of phase measurements of laser Fizeau interferometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2870, Issue , 1996, Pages 545-552

  Novak, Erik ^a   Ai, Chiayu ^a   Wyant, James C ^a  

^a WYKO Corporation   (United States)

Author keywords

Fresnel propagation; Interferometry; Phase grating; Power spectral density; Resolution; Transfer function

Indexed keywords

DIFFRACTION GRATINGS; FUSED SILICA; INERTIAL CONFINEMENT FUSION; INTERFEROMETERS; LASER BEAMS; LASER OPTICS; OPTICAL RESOLVING POWER; PHASE MEASUREMENT; POWER SPECTRAL DENSITY; SPECTRAL DENSITY; SURFACE MEASUREMENT; TRANSFER FUNCTIONS;

COMMERCIAL INTERFEROMETERS; FRESNEL PROPAGATION; HIGH SPATIAL FREQUENCY; INTERFEROMETRIC MEASUREMENT; INTERMEDIATE IMAGE; LASER FIZEAU INTERFEROMETER; PHASE GRATING; SINUSOIDAL PHASE GRATINGS;

INTERFEROMETRY;

EID: 0013108535     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.259942     Document Type: Conference Paper

References (5)

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3. J. Gaskill, Linear Systems, Fourier Transforms, and Optics, Chapters 7-10, John Wiley and Sons, New York, 1978
4. Peter Takacs, Michelle X.-O. Li, Karen Furenlid, "A Step-Height Standard for Surface Profiler Calibration", Optical Scattering: Applications, Measurement and Theory II, pp. 65-74, Proc. SPIE, Vol. 1993, 1993
5. Joseph Goodman, Introduction to Fourier Optics, pp. 60-70, McGraw Hill, San Francisco, 1988