Surface evolution of polycrystalline Al films deposited on amorphous substrates at elevated temperatures

Journal of Applied Physics

Volumn 89, Issue 11 I, 2001, Pages 6085-6091

  Eisenmenger Sittner, C ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035356195     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1368864     Document Type: Article

References (36)

1. A.-L. Barabási and H. E. Stanley, Fractal Concepts in Surface Growth (Cambridge University Press, Cambridge, England, 1995).
2. M. Kardar, G. Parisi, and Y.-C. Zhang, Phys. Rev. Lett. 56, 889 (1986).
3. T. Nattermann and L.-H. Tang, Phys. Rev. A 45, 7156 (1992).
4. L.-H. Tang, B. M. Forrest, and D. E. Wolf, Phys. Rev. A 45, 7162 (1992).
5. C. Herring, in The Physics of Powder Metallurgy, edited by W. E. Kingston (McGraw-Hill, New York, 1951), pp. 143-179.
6. W. W. Mullins, J. Appl. Phys. 28, 333 (1957).
7. W. W. Mullins, J. Appl. Phys. 30, 77 (1959).
8. M. P. Anderson, D. J. Srolovitz, G. S. Grest, and P. S. Sahni, Acta Metall. 32, 783 (1984).
9. D. J. Srolovitz, J. Vac. Sci. Technol. A 4, 2925 (1986).
10. F. Liu and H. Metiu, Phys. Rev. B 48, 5808 (1993).
11. D. G. Vlachos, L. D. Schmidt, and R. Aris, Phys. Rev. B 47, 4896 (1993).
12. J. A. Thornton, J. Vac. Sci. Technol. 12, 830 (1975).
13. S. Craig and G. L. Harding, J. Vac. Sci. Technol. 19, 205 (1981).
14. M. A. Cotta, R. A. Hamm, T. W. Staley, S. N. G. Chu, L. R. Harriott, and M. B. Panish, Phys. Rev. Lett. 70, 4106 (1993.)
15. H. You, R. P. Chiarello, H. R. Kim, and K. G. Vandervoort, Phys. Rev. Lett. 70, 2900 (1993).
16. G. Palasantzas and J. Krim, Phys. Rev. Lett. 73, 3564 (1994).
17. H. Poppa, R. D. Moorehead, and K. Heinemann, Nucl. Instrum. Methods 621, 102 (1972).
18. D. D. Chambliss, R. J. Wilson, and S. Chiang, J. Vac. Sci. Technol. A 10, 1993 (1992).
19. D. E. Savage, N. Schimke, Y.-H. Phang, and M. G. Lagally, J. Appl. Phys. 71, 3283 (1992).
20. R. S. Williams, Appl. Surf. Sci. 60/61, 613 (1992).
21. H. Bangert, C. Eisenmenger-Sittner, and A. Bergauer, Surf. Coat. Technol. 80, 162 (1996).
22. E. A. Eklund, E. J. Snyder, and R. S. Williams, Surf. Sci. 285, 157 (1993).
23. A. E. Lita and J. E. Sanchez, Jr., J. Appl. Phys. 85, 876 (1999).
24. J. A. Oglivy, Theory of Wave Scattering From Random Rough Surfaces (Institute of Physics, Philadelphia, 1991).
25. T. Vicsek, Fractal Growth Phenomena (World Scientific, Singapore, 1989).
26. J. D. Erlebacher and M. J. Aziz, Surf. Sci. 374, 427 (1997).
27. J. A. Venables, G. D. T. Spiller, and M. Hanbücken, Rep. Prog. Phys. 47, 399 (1984).
28. V. I. Trofimov, Mater. Res. Soc. Symp. Proc. 440, 401 (1997).
29. C. Eisenmenger-Sittner, A. Bergauer, H. Bangert, and W. Bauer, J. Appl. Phys. 78, 4899 (1995).
30. G. Neumann and G. M. Neumann, Surface Self Diffusion of Metals, edited by F. H. Wöhlbier, Diffusion Monograph Series No. 1 (Diffusion Information Center, Bay Village, OH, 1972).
31. R. Stumpf and M. Scheffler, Phys. Rev. Lett. 72, 254 (1993).
32. J. P. Nielsen, in Recrystallization, Grain Growth and Textures (American Society of Metals, Ohio, 1966).
33. E. S. Machlin, Thermodynamics and Kinetics Relevant to Materials Science (Giro, Croton-on-Hudson, NY, 1991).
34. P. S. Sahni, D. J. Srolovitz, G. S. Grest, M. P. Anderson, and S. A. Safran, Phys. Rev. B 28, 2705 (1983).
35. J. M. Thijssen, H. J. F. Knops, and A. J. Dammers, Phys. Rev. B 45, 8650 (1992).
36. A. B. Bortz, M. H. Kalos, and J. L. Lebowitz, J. Comput. Phys. 17, 10 (1975).