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Volumn 22, Issue 40, 2011, Pages
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The evolution of carbon nanotubes during their growth by plasma enhanced chemical vapor deposition
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Author keywords
[No Author keywords available]
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Indexed keywords
ALIGNED CNTS;
CATALYST COATING;
CATALYST PARTICLES;
CATALYTIC PARTICLES;
GROWTH MODES;
GROWTH PROCESS;
GROWTH TIME;
THREE STAGES;
CARBON NANOTUBES;
CATALYSTS;
COATINGS;
ION BOMBARDMENT;
PLASMA DEPOSITION;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
PLASMA ETCHING;
PLASMAS;
CHEMICAL VAPOR DEPOSITION;
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EID: 80052916107
PISSN: 09574484
EISSN: 13616528
Source Type: Journal
DOI: 10.1088/0957-4484/22/40/405601 Document Type: Article |
Times cited : (18)
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References (28)
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