NH3 effect on the growth of carbon nanotubes on glass substrate in plasma enhanced chemical vapor deposition

Thin Solid Films

Volumn 409, Issue 1, 2002, Pages 120-125

  Han, Jae Hee ^a   Lee, Chong Hyun ^a   Jung, Duk Young ^a   Yang, Chul Woong ^a   Yoo, Ji Beom ^a   Park, Chong Yun ^a   Kim, Ha Jin ^b   Yu, SeGi ^b   Yi, Whikun ^b   Park, Gyeong Su ^b   Han, I T ^b   Lee, N S ^c   Kim, J M ^b  

^a Sungkyunkwan University   (South Korea)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^c Sejong University   (South Korea)

Author keywords

Carbon nanotubes; NH3; Plasma enhanced chemical vapor deposition

Indexed keywords

AMMONIA; CRYSTAL GROWTH; MORPHOLOGY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SUBSTRATES; SURFACE REACTIONS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

CARBON FILMS;

CARBON NANOTUBES;

EID: 0037156086     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00114-1     Document Type: Conference Paper

References (10)