Effect of ion bombardment on the synthesis of vertically aligned single-walled carbon nanotubes by plasma-enhanced chemical vapor deposition

Nanotechnology

Volumn 19, Issue 25, 2008, Pages

  Luo, Zhiqiang ^a,b   Lim, Sanhua ^a   You, Yumeng ^b   Miao, Jianmin ^c   Gong, Hao ^d   Zhang, Jixuan ^d   Wang, Shanzhong ^e   Lin, Jianyi ^a   Shen, Zexiang ^b  

^a INSTITUTE OF CHEMICAL AND ENGINEERING SCIENCES   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^d NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^e STMICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

AEROSPACE APPLICATIONS; CARBON; CARBON NANOTUBES; CHARGED PARTICLES; CUBIC BORON NITRIDE; ELECTRONS; ETCHING; ETHYLENE; FULLERENES; GASES; ION BOMBARDMENT; IONS; IRON; METALLIZING; MICROFLUIDICS; NANOCOMPOSITES; NANOPORES; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NANOTECHNOLOGY; NANOTUBES; PHOTOACOUSTIC EFFECT; PLASMA (HUMAN); PLASMA DEPOSITION; PLASMA DIAGNOSTICS; PLASMA SHEATHS; PLASMAS; POWER QUALITY; PRESSURE; SINGLE-WALLED CARBON NANOTUBES (SWCN); SYNTHESIS (CHEMICAL); VAPOR DEPOSITION; VAPORS;

CAPACITIVELY COUPLED; CARBON SOURCES; ETCHING EFFECT; GAS PRESSURES; HIGH QUALITY (HQ); INPUT POWERS; ION FLUXES; LOW TEMPERATURE (LTR); PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD); RADIO FREQUENCY (RF); SINGLE-WALLED CARBON NANOTUBES (SWCNTS); STRUCTURAL DEFECTS; STRUCTURAL TRANSITIONS; SYNTHESIS (OF CHIRAL IONIC LIQUIDS); VERTICALLY ALIGNED; WALLED NANOTUBES;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

ETHYLENE; IRON; SINGLE WALLED NANOTUBE;

ARTICLE; CATALYST; CHEMICAL STRUCTURE; FILM; ION TRANSPORT; PRIORITY JOURNAL; SYNTHESIS; TEMPERATURE SENSITIVITY; VAPOR;

EID: 44949179307     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/19/25/255607     Document Type: Article

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