Review of MEMS flow sensors based on artificial hair cell sensor

Microsystem Technologies

Volumn 17, Issue 9, 2011, Pages 1417-1426

  Mat Nawi, Mohd Norzaidi ^a   Manaf, Asrulnizam Abd ^a   Arshad, Mohd Rizal ^a   Sidek, Othman ^b  

^a SCHOOL OF PHYSICS   (Malaysia)

^b SCHOOL OF CHEMICAL ENGINEERING   (Malaysia)

Author keywords

[No Author keywords available]

Indexed keywords

COMMERCIAL SENSORS; CURRENT TECHNOLOGY; FLOW-SENSORS; FORCE SENSITIVE RESISTORS; HAIR CELLS; MEASUREMENT DATA; PIEZO-RESISTORS; RESEARCH AREAS; SENSING ELEMENTS; STRAIN GAUGE; SURFACE VEHICLES; UNDERWATER APPLICATION;

AUTONOMOUS UNDERWATER VEHICLES; GAGES;

SENSORS;

EID: 80052649698     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-011-1330-y     Document Type: Review

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