Hydrogen sensor based on Pd-functionalized film bulk acoustic resonator

Sensors and Actuators, B: Chemical

Volumn 159, Issue 1, 2011, Pages 234-237

  Chen, Da ^a   Wang, Jing Jing ^a   Li, De Hua ^a   Xu, Yan ^a  

^a SHANDONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Film bulk acoustic resonators; Hydrogen sensors; Pd sensitive film; Surface fictionalization

Indexed keywords

ALN; DETECTION METHODS; ELASTIC PROPERTIES; FABRICATION PROCESS; FILM BULK ACOUSTIC RESONATORS; HIGH SENSITIVITY; HYDROGEN DETECTION; HYDROGEN SENSOR; HYDROGEN SENSORS; PD FILM; PIEZOELECTRIC STACK; RAPID RESPONSE; RESONANCE FREQUENCIES; ROOM TEMPERATURE;

ACOUSTIC EQUIPMENT; CHEMICAL SENSORS; HYDROGEN; RESONANCE; RESONATORS;

ACOUSTIC RESONATORS;

EID: 80052321423     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.06.078     Document Type: Article

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