SCOPUS 정보 검색 플랫폼

Vacuum

Volumn 85, Issue 2, 2010, Pages 302-306

The AlN based solidly mounted resonators consisted of the all-metal conductive acoustic Bragg reflectors

(6) Chen, Da a Xu, Yan a Wang, Jingjing a Zhang, Luyin a Wang, Xueshui a Liang, Min a

a SHANDONG UNIVERSITY OF SCIENCE AND TECHNOLOGY (China)

Author keywords

AlN films; Q factor; The all metal Bragg reflectors; The solidly mounted resonators

Indexed keywords

ACOUSTIC ENERGY; ALN; ALN FILMS; BOTTOM ELECTRODES; FREQUENCY SELECTION; PARASITIC RESISTANCES; Q-FACTORS; RESONANCE FREQUENCIES; RESONANT PHENOMENA; SHEAR MODES; SIDE LOBES; SOLIDLY MOUNTED RESONATOR; THE ALL-METAL BRAGG REFLECTORS;

ACOUSTIC RESONATORS; ACOUSTICS; BRAGG REFLECTORS; FREQUENCY RESPONSE; METALS; Q FACTOR MEASUREMENT; RESONANCE; RESONATORS;

REFLECTION;

EID: 77956617203 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/j.vacuum.2010.07.001 Document Type: Article

Times cited : (18)

References (13)

1
- 74849138097
- S.J. Cheon, and J.Y. Park Microw Opt Tech Let 52 2010 540 543
- (2010) Microw Opt Tech Let , vol.52 , pp. 540-543
- Cheon, S.J.¹ Park, J.Y.²

2
- 74849109399
- D. Kim, D.H. Kim, G.H. Baek, J.I. Ryu, C.D. Park, and C.S. Kim Microw Opt Tech Let 52 2010 753 757
- (2010) Microw Opt Tech Let , vol.52 , pp. 753-757
- Kim, D.¹ Kim, D.H.² Baek, G.H.³ Ryu, J.I.⁴ Park, C.D.⁵ Kim, C.S.⁶

3
- 22544431941
- Y. Satoh, T. Nishihara, T. Yokoyama, M. Ueda, and T. Miyashita Jpn J Appl Phys 44 2005 2883 2894
- (2005) Jpn J Appl Phys , vol.44 , pp. 2883-2894
- Satoh, Y.¹ Nishihara, T.² Yokoyama, T.³ Ueda, M.⁴ Miyashita, T.⁵

4
- 33947645345
- G. Wingqvist, J. Bjurstroöm, L. Liljeholm, V. Yantchev, and I. Katardjiev Sens Actuators B 123 2007 466 473
- (2007) Sens Actuators B , vol.123 , pp. 466-473
- Wingqvist, G.¹ Bjurstroöm, J.² Liljeholm, L.³ Yantchev, V.⁴ Katardjiev, I.⁵

5
- 28344434375
- M. Benetti, D. Cannat, F. Di Pietrantonio, V. Foglietti, and E. Verona Appl Phys Lett 87 2005 1 3
- (2005) Appl Phys Lett , vol.87 , pp. 1-3
- Benetti, M.¹ Cannat, D.² Di Pietrantonio, F.³ Foglietti, V.⁴ Verona, E.⁵

6
- 71649104294
- M. Nirschl, A. Blleer, C. Erler, B. Katzschner, I. Vikholm-Lundin, and S. Auer Sens Actuator A 156 2009 180 184
- (2009) Sens Actuator A , vol.156 , pp. 180-184
- Nirschl, M.¹ Blleer, A.² Erler, C.³ Katzschner, B.⁴ Vikholm-Lundin, I.⁵ Auer, S.⁶

7
- 24644488706
- H. Zhang, and E.S. Kim J Microelectromech S 14 2005 699 706
- (2005) J Microelectromech S , vol.14 , pp. 699-706
- Zhang, H.¹ Kim, E.S.²

8
- 0036578471
- H. Kobayashi, Y. Ishida, K. Ishikawa, A. Doi, and K. Nakamura Jpn J Appl Phys 41 2002 3455 3457
- (2002) Jpn J Appl Phys , vol.41 , pp. 3455-3457
- Kobayashi, H.¹ Ishida, Y.² Ishikawa, K.³ Doi, A.⁴ Nakamura, K.⁵

9
- 43949106863
- C.J. Chung, Y.C. Chen, C.C. Cheng, and K.S. Kao Thin Solid Films 516 2008 5277 5281
- (2008) Thin Solid Films , vol.516 , pp. 5277-5281
- Chung, C.J.¹ Chen, Y.C.² Cheng, C.C.³ Kao, K.S.⁴

10
- 21644481772
- Volume manufacturing of BAW-filters in a CMOS fab 2004
- Chiba Japan, March 2004
- Aigner R, Volume manufacturing of BAW-filters in a CMOS fab 2004. In: Acoustic wave device symp., Chiba Japan, March 2004, pp. 127-132.
- Acoustic Wave Device Symp. , pp. 127-132
- Aigner, R.¹

11
- 77952865919
- Bulk-acoustic-wave filters for cell phone applications
- Workshop Note & Short Course, WMB-14
- Aigner R, Bulk-acoustic-wave filters for cell phone applications. In: IEEE int'l, microwave, symp., Workshop Note & Short Course, WMB-14; 2004.
- (2004) IEEE int'L, Microwave, Symp.
- Aigner, R.¹

12
- 3142550780
- M. Yim, D.H. Kim, D. Chai, and G.J. Yoon Vac Sci Technol A 22 2004 465 471
- (2004) Vac Sci Technol A , vol.22 , pp. 465-471
- Yim, M.¹ Kim, D.H.² Chai, D.³ Yoon, G.J.⁴

13
- 38149017727
- J. Enlund, D. Martin, V. Yantchev, and I. Katardjiev Sens Actuator A 141 2008 598 602
- (2008) Sens Actuator A , vol.141 , pp. 598-602
- Enlund, J.¹ Martin, D.² Yantchev, V.³ Katardjiev, I.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.