Optimising the location of crossovers in conveyor-based automated material handling systems in semiconductor wafer fabs

International Journal of Production Research

Volumn 49, Issue 20, 2011, Pages 6199-6226

  Hong, Soondo ^a   Johnson, Andrew L ^a   Carlo, Hector J ^b   Nazzal, Dima ^c   Jimenez, Jesus A ^d  

^a Texas A and M University   (United States)

^b UNIVERSITY OF PUERTO RICO   (Puerto Rico)

^c University of Central Florida   (United States)

^d Texas State University   (United States)

Author keywords

AMHS; analytical models; conveyors; crossovers; facility design; heuristics; wafer fabrication

Indexed keywords

AMHS; ANALYTICAL MODEL; CROSSOVERS; FACILITY DESIGN; HEURISTICS; WAFER FABRICATIONS;

COMPUTER SIMULATION; CONVEYORS; FABRICATION; HEURISTIC ALGORITHMS; MATHEMATICAL MODELS; MODELS; OPTIMIZATION; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

MATERIALS HANDLING;

EID: 80052181858     PISSN: 00207543     EISSN: 1366588X     Source Type: Journal    
DOI: 10.1080/00207543.2010.528059     Document Type: Article

References (24)

1. Agrawal, G. and Heragu, S., 2006. A survey of automated material handling systems in 300mm SemiconductorFabs. IEEE Transactions on Semiconductor Manufacturing, 19, 112-120. (Pubitemid 43269771)
2. Arzt, T. and Bulcke, F., 1999. A new low cost approach in 200mm and 300mm AMHS. Semiconductor Fabtech, Edition, 10, 19-26.
3. Bass, E. and Wright, R., 2008. Modeling semiconductor factories for equipment and cycle time reduction opportunities. Future Fab International, 24, 50-55.
4. Bozer, Y.A. and Hsieh, Y-J., 2005. Throughput performance analysis and machine layout for discrete-space closed-loop conveyors. IIE Transactions, 37 (1), 77-89. (Pubitemid 40085427)
5. Brown, C. and Linden, G., 2009. Chips and change: How crisis reshapes the semiconductor industry. Cambridge, MA: MIT Press.
6. Goldberg, D.E., 1989. Genetic algorithms in search, optimization and machine learning. Reading, MA: Addison-Wesley.
7. Heragu, S., 1997. Facilities design. 1st ed. Boston, MA: PWS.
8. Johnson, A.L., et al., 2009. A greedy heuristic for locating crossovers in conveyor-based AMHS. In: M.D. Rossetti, et al., eds. Proceedings of the 2009 winter simulation conference, 13-16 December, 1667-1676.
9. Johnson, C., 2001. Automated reticle delivery in a 300mm fab. Semiconductor International, 24 (6), 99-106. (Pubitemid 32660053)
10. Marshall, L., Rust, K., and Schmidt, K., 2007. 30mm prime gaps that need to be addressed to boost productivity. In: Proceedings of the international symposium on semiconductor manufacturing (ISSM 2007), 15-17 October, Santa Clara, CA, 1-4.
11. Meller, R.D., 1997. The multi-bay manufacturing facility layout problem. International Journal of Production Research, 35 (5), 1229-1237. (Pubitemid 127549664)
12. Myers, S., 2007. The 450mm debate. Semiconductor International, 30 (2), 61-63.
13. Nazzal, D. and El-Nashar, A., 2007. Survey of research in modeling conveyor-based automated material handling systems in wafer fabs. In: Proceedings of the 2007 winter simulation conference, Washington DC: IEEE Press, 1781-1788.
14. Nazzal, D., et al., 2010. An analytical model for conveyor-based material handling system with crossovers in semiconductor wafer fabs. IEEE Transactions on Semiconductor Manufacturing, 23 (3), 468-476.
15. Peters, B.A. and Yang, T., 1997. Integrated facility layout and material handling system design in semiconductor fabrication facilities. IEEE Transactions on Semiconductor Manufacturing, 10 (3), 360-369. (Pubitemid 127763005)
16. Pettinato, J.S. and Pillai, D., 2005. Technology decisions to minimize 450mm wafer size transition risk. IEEE Transactions on Semiconductor Manufacturing, 18 (4), 501-509. (Pubitemid 41750295)
17. Pillai, D., 2006. The future of semiconductor manufacturing. IEEE Robotics and Automation Magazine, 13 (4), 16-24. (Pubitemid 46454537)
18. SEMATECH, 2002. Fab simulation modeling software [online]. Available from: Http://ismi. sematech.org/modeling/simulation/index.htm#models [Accessed 18 March 2010].
19. SEMATECH, 2002. Fab simulation modeling software [online]. Available from: Http://ismi. sematech.org/modeling/simulation/index.htm#models [Accessed 18 March 2010].
20. Ting, J.H. and Tanchoco, J.M., 2000. Unidirectional circular layout for overhead material handling systems. International Journal of Production Research, 38 (16), 3913-3936.
21. Ting, J.H. and Tanchoco, J.M., 2001. Optimal bidirectional spine layout for overhead material handling systems. IEEE Transactions on Semiconductor Manufacturing, 14 (1), 57-64. (Pubitemid 32286683)
22. Uzsoy, R., Lee, C.Y., and Martinvega, L.A., 1992. A review of production planning and scheduling models in the semiconductor industry part 1: System characteristics, performance evaluation and production planning. IIE Transactions, 24 (4), 47-60.
23. Yang, T. and Peters, B.A., 1997. A spine layout design method for semiconductor fabrication facilities containing automated material-handling systems. International Journal of Operations and Production Management, 17 (5), 490-501.
24. Yang, T., Rajasekharan, M., and Peters, B.A., 1999. Semiconductor fabrication facility design using a hybrid search methodology. Computers and Industrial Engineering, 36 (3), 565-583. (Pubitemid 129304002)