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Volumn , Issue , 2009, Pages 1667-1676

A greedy heuristic for locating crossovers in conveyor-based AMHS in wafer fabs

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL MODEL; AUTOMATED MATERIAL HANDLING SYSTEMS; DELIVERY TIME; GREEDY HEURISTICS; IN-PROCESS; NUMERICAL RESULTS; OPTIMAL LAYOUT; SEMATECH; SEMI-CONDUCTOR WAFER; WAFER-FABS;

EID: 77951594690     PISSN: 08917736     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/WSC.2009.5429177     Document Type: Conference Paper
Times cited : (11)

References (12)
  • 1
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    • A survey of automated material handling systems in 300-mm semiconductor fabs
    • DOI 10.1109/TSM.2005.863217
    • Agrawal, G.K., and S.S. Heragu. 2006. A survey of automated material handling systems in 300-mm Semiconductor Fabs. IEEE Transactions on Semiconductor Manufacturing 19:112-120. (Pubitemid 43269771)
    • (2006) IEEE Transactions on Semiconductor Manufacturing , vol.19 , Issue.1 , pp. 112-120
    • Agrawal, G.K.1    Heragu, S.S.2
  • 2
    • 77951545769 scopus 로고    scopus 로고
    • Modeling semiconductor factories for equipment and cycle time reduction opportunities
    • Bass, E. and R. Wright. 2008. Modeling semiconductor factories for equipment and cycle time reduction opportunities, Future Fab International 24:50-55.
    • (2008) Future Fab International , vol.24 , pp. 50-55
    • Bass, E.1    Wright, R.2
  • 3
    • 11844301290 scopus 로고    scopus 로고
    • Throughput performance analysis and machine layout for discrete-space closed-loop conveyors
    • Bozer, Y.A., and Y-J. Hsieh. 2005. Throughput performance analysis and machine layout for discrete-space closed-loop conveyors. IIE Transactions 37:77-89.
    • (2005) IIE Transactions , vol.37 , pp. 77-89
    • Bozer, Y.A.1    Hsieh, Y.-J.2
  • 5
    • 33750535173 scopus 로고    scopus 로고
    • A Literature Survey on the Design Approaches and Operational Issues of Automated Wafer-Transport Systems for Wafer Fabs
    • Montoya-Torres, J.R. 2006. A Literature Survey on the Design Approaches and Operational Issues of Automated Wafer-Transport Systems for Wafer Fabs. Production Planning and Control 7:648-663.
    • (2006) Production Planning and Control , vol.7 , pp. 648-663
    • Montoya-Torres, J.R.1
  • 6
    • 49749090780 scopus 로고    scopus 로고
    • Survey of research in modeling conveyor-based automated material handling systems in wafer fabs
    • eds. S. G. Henderson, B. Biller, M.-H Hsieh, J. Shortle, J. D. Tew, and R. R. Barton, Piscataway, New Jersey: Institute of Electrical and Electronics Engineers, Inc., 1760-1767
    • Nazzal, D., and A. El-Nashar. 2007. Survey of research in modeling conveyor-based automated material handling systems in wafer fabs. In Proceedings of the 2007 Winter Simulation Conference,eds. S. G. Henderson, B. Biller, M.-H Hsieh, J. Shortle, J. D. Tew, and R. R. Barton, 1977-1985. Piscataway, New Jersey: Institute of Electrical and Electronics Engineers, Inc., 1760-1767.
    • (2007) Proceedings of the 2007 Winter Simulation Conference , pp. 1977-1985
    • Nazzal, D.1    El-Nashar, A.2
  • 7
    • 60749108614 scopus 로고    scopus 로고
    • An analytical model for conveyor based AMHS in semiconductor wafer fabs
    • eds. S. J. Mason, R. R. Hill, L. Mönch, O. Rose, T. Jefferson, J. W. Fowler, Piscataway, New Jersey: Institute of Electrical and Electronics Engineers, Inc., 2148-2155
    • Nazzal, D., A. Johnson, H.J. Carlo, and J.A. Jimenez. 2008. An analytical model for conveyor based AMHS in semiconductor wafer fabs. In Proceedings of the 2008 Winter Simulation Conference, eds. S. J. Mason, R. R. Hill, L. Mönch, O. Rose, T. Jefferson, J. W. Fowler, 463- 470. Piscataway, New Jersey: Institute of Electrical and Electronics Engineers, Inc., 2148-2155.
    • (2008) Proceedings of the 2008 Winter Simulation Conference , pp. 463-470
    • Nazzal, D.1    Johnson, A.2    Carlo, H.J.3    Jimenez, J.A.4
  • 9
    • 0031200370 scopus 로고    scopus 로고
    • Integrated facility layout and material handling system design in semiconductor fabrication facilities
    • Peters, B.A., and T. Yang. 1997. Integrated facility layout and material handling system design in semiconductor fabrication facilities. IEEE Transactions on Semiconductor Manufacturing 10:360-369.
    • (1997) IEEE Transactions on Semiconductor Manufacturing , vol.10 , pp. 360-369
    • Peters, B.A.1    Yang, T.2
  • 12
    • 0033161827 scopus 로고    scopus 로고
    • Semiconductor fabrication facility design using a hybrid search methodology
    • Yang, T., M. Rajasekharan, and B.A. Peters. 1999. Semiconductor fabrication facility design using a hybrid search methodology. Computers & Industrial Engineering 36:565-583. (Pubitemid 129304002)
    • (1999) Computers and Industrial Engineering , vol.36 , Issue.3 , pp. 565-583
    • Yang, T.1    Rajasekharan, M.2    Peters, B.A.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.