메뉴 건너뛰기




Volumn , Issue , 2011, Pages 2817-2820

Experimental evaluation of alternative drive-mode control electronics developed for high-performance MEMS gyroscopes

Author keywords

angular rate sensor; automatic gain control; drive mode control electronics; Gyroscope

Indexed keywords

ANGULAR RATE SENSORS; AUTOMATIC GAIN CONTROL; BIAS STABILITY; COMPREHENSIVE STUDIES; CONTROL ELECTRONICS; DRIVE-MODE CONTROL ELECTRONICS; DRIVING SIGNAL; EXPERIMENTAL EVALUATION; MEASUREMENT RESULTS; MEMS GYROSCOPE; MICROMACHINED; NOISE SOURCE; PERFORMANCE CHARACTERIZATION; RANDOM WALK; SINUSOIDAL WAVE; SQUARE WAVES; VIBRATORY GYROSCOPE; WAVE FORMS;

EID: 80052121358     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969566     Document Type: Conference Paper
Times cited : (5)

References (7)
  • 1
    • 50149112028 scopus 로고    scopus 로고
    • A 0.1deg;/hr bias drift electronically matched tuning fork microgyroscope
    • Conference, Tucson, AZ, January 13-17, 2008
    • A. Sharma, M. F. Zaman, M. Zucher, and F. Ayazi, "A 0.1deg;/hr bias drift electronically matched tuning fork microgyroscope" Digest Tech. Papers, MEMS 2008 Conference, Tucson, AZ, January 13-17, 2008, pp. 6-9.
    • (2008) Digest Tech. Papers, MEMS , pp. 6-9
    • Sharma, A.1    Zaman, M.F.2    Zucher, M.3    Ayazi, F.4
  • 2
    • 85008044992 scopus 로고    scopus 로고
    • Micromachined angular rate sensors for automotive applications
    • R. Neul et. al, "Micromachined Angular Rate Sensors for Automotive Applications" IEEE Sensors Journal, Vol.7, No.2, pp. 302-309, 2007.
    • (2007) IEEE Sensors Journal , vol.7 , Issue.2 , pp. 302-309
    • Neul, R.1
  • 3
    • 34748831862 scopus 로고    scopus 로고
    • Design and performance test of a MEMS vibratory gyroscope with a novel AGC force rebalance control
    • W.-T. Sung, S. Sung, J. G. Lee, and T. Kang, "Design and performance test of a MEMS vibratory gyroscope with a novel AGC force rebalance control" J. Micromech. Microeng., Vol. 17, No. 10, pp. 1939-1948, 2007.
    • (2007) J. Micromech. Microeng. , vol.17 , Issue.10 , pp. 1939-1948
    • Sung, W.-T.1    Sung, S.2    Lee, J.G.3    Kang, T.4
  • 4
    • 34547411233 scopus 로고    scopus 로고
    • A 0.2deg;/hr micro-gyroscope with automatic CMOS mode matching
    • Conference, San Francisco, CA, February 11-15, 2007
    • A. Sharma, M. F. Zaman, F. Ayazi, "A 0.2deg;/hr Micro-Gyroscope with Automatic CMOS Mode Matching" Digest Tech. Papers, ISSCC 2007 Conference, San Francisco, CA, February 11-15, 2007, pp. 386-387.
    • (2007) Digest Tech. Papers, ISSCC , pp. 386-387
    • Sharma, A.1    Zaman, M.F.2    Ayazi, F.3
  • 6
    • 57449086117 scopus 로고    scopus 로고
    • A compact angular rate sensor system using a fully-decoupled silicon-on-glass MEMS gyroscope
    • S. E. Alper, Y. Temiz, and T. Akin, "A Compact Angular Rate Sensor System using a Fully-Decoupled Silicon-on-Glass MEMS Gyroscope" J. Microelectromechanical Systems, Vol.17, No. 6, pp. 1418-1429.
    • J. Microelectromechanical Systems , vol.17 , Issue.6 , pp. 1418-1429
    • Alper, S.E.1    Temiz, Y.2    Akin, T.3
  • 7
    • 33745181443 scopus 로고    scopus 로고
    • Electronics for coriolis force and other sensors
    • P.Ward, "Electronics for Coriolis Force and Other Sensors" U.S. Patent 5481914, 1996.
    • (1996) U.S Patent 5481914
    • Ward, P.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.