A compact angular rate sensor system using a fully decoupled silicon-on-glass MEMS gyroscope

Journal of Microelectromechanical Systems

Volumn 17, Issue 6, 2008, Pages 1418-1429

  Alper, Said Emre ^a   Temiz, Yuksel ^a,b   Akin, Tayfun ^a  

^a MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

^b EPFL   (Switzerland)

Author keywords

Angular rate sensor; Gyroscopes; Quadrature coupling; Silicon on glass (SOG) micromachining

Indexed keywords

ASPECT RATIO; COMPOSITE MICROMECHANICS; ELECTROMECHANICAL DEVICES; ELECTRONIC EQUIPMENT MANUFACTURE; ETCHING; GLASS; INTEGRATED CIRCUITS; MEMS; MICROELECTROMECHANICAL DEVICES; NETWORKS (CIRCUITS); NONMETALS; PLASMA ETCHING; POWDERS; PRINTED CIRCUIT BOARDS; PRINTED CIRCUIT MANUFACTURE; SENSORS; SILICON; SUBSTRATES; SYSTEM STABILITY;

ANGULAR RATE SENSOR; ANGULAR RATE SENSORS; BIAS INSTABILITIES; CORE ELEMENTS; CRYSTAL SILICONS; DIFFERENTIAL SENSES; GLASS PROCESSES; MEMS GYROSCOPES; METAL LAYERS; MICRO-ELECTRO-MECHANICAL SYSTEMS; MODE OSCILLATIONS; NON LINEARITIES; QUADRATURE COUPLING; RANDOM WALKS; SENSE MODES; SILICON SUBSTRATES; STRUCTURAL DEFORMATIONS; VACUUM AMBIENT;

GYROSCOPES;

EID: 57449086117     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.2007274     Document Type: Article

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