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Volumn , Issue , 2011, Pages 2805-2808

Multi-DOF inertial MEMS: From gaming to dead reckoning

Author keywords

accelerometers; degrees of freedom (DOF); gyroscopes; Inertial measurement unit (IMU); magnetometers

Indexed keywords

DEAD RECKONING; DEGREES OF FREEDOM (DOF); INERTIAL MEASUREMENT UNIT; MULTI-AXIS SENSORS; MULTI-DOF; SINGLE-CHIP;

EID: 80052109117     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969885     Document Type: Conference Paper
Times cited : (84)

References (19)
  • 1
    • 0032138896 scopus 로고    scopus 로고
    • Micromachined inertial sensors
    • N. Yazdi, et al., "Micromachined inertial sensors," Proc. IEEE, vol. 86, pp. 1640-1659, 1998.
    • (1998) Proc. IEEE , vol.86 , pp. 1640-1659
    • Yazdi, N.1
  • 2
    • 80052112290 scopus 로고    scopus 로고
    • ST Microelectronics. LIS331DLH - 3-axis digital output accelerometer [Online
    • ST Microelectronics. LIS331DLH - 3-axis digital output accelerometer [Online: Www.st.com]
  • 3
    • 80052131894 scopus 로고    scopus 로고
    • Kionix. KXR94 - Tri-Axis multiplexed analog and digital accelerometer [Online:
    • Kionix. KXR94 - Tri-Axis multiplexed analog and digital accelerometer [Online: Www.kionix.com]
  • 4
    • 80052108446 scopus 로고    scopus 로고
    • Analog Devices. ADXL337 - Small, Low Power, 3-Axis Accelerometer [Online
    • Analog Devices. ADXL337 - Small, Low Power, 3-Axis Accelerometer [Online: Www.analog.com]
  • 5
    • 80052121709 scopus 로고    scopus 로고
    • ST Microelectronics. L3G4200D - 3-axis digital output gyroscope [Online:
    • ST Microelectronics. L3G4200D - 3-axis digital output gyroscope [Online: Www.st.com]
  • 6
    • 80052131715 scopus 로고    scopus 로고
    • InvenSense. ITG-3200 - Integrated triple-axis digital-output gyroscope [Online: Invensense.com]
    • InvenSense. ITG-3200 - Integrated triple-axis digital-output gyroscope [Online: Invensense.com]
  • 7
    • 80052104347 scopus 로고    scopus 로고
    • VTI Technologies. CMR-3000-D01 - 3-axis gyro with digital-output [Online
    • VTI Technologies. CMR-3000-D01 - 3-axis gyro with digital-output [Online: Www.vti.fi]
  • 8
    • 80052107946 scopus 로고    scopus 로고
    • InvenSense. MPU-6000 - Integrated 3-Axis Gyro, 3-Axis Accel and 9-Axis Sensor Fusion [Online]
    • InvenSense. MPU-6000 - Integrated 3-Axis Gyro, 3-Axis Accel and 9-Axis Sensor Fusion [Online]
  • 9
    • 80052125339 scopus 로고    scopus 로고
    • Analog Devices. ADIS16375 - Low Profile Low Noise 6-DOF Inertial Sensor [Online: Analog.com]
    • Analog Devices. ADIS16375 - Low Profile, Low Noise 6-DOF Inertial Sensor [Online: Analog.com]
  • 10
    • 33750118637 scopus 로고    scopus 로고
    • High performance matched-mode tuning fork gyroscope
    • M. F. Zaman, et al., "High Performance Matched-Mode Tuning Fork Gyroscope," IEEE MEMS 2006, pp. 66-69.
    • (2006) IEEE MEMS , pp. 66-69
    • Zaman, M.F.1
  • 11
    • 65849165323 scopus 로고    scopus 로고
    • The resonating star gyroscope: A novel multiple-shell silicon gyroscope with sub-5 deg/hr allan deviation bias instability
    • M. F. Zaman, et al., "The Resonating Star Gyroscope: A Novel Multiple-Shell Silicon Gyroscope With Sub-5 deg/hr Allan Deviation Bias Instability," IEEE Sensors Journal, vol. 9, pp. 616-624, 2009.
    • (2009) IEEE Sensors Journal , vol.9 , pp. 616-624
    • Zaman, M.F.1
  • 12
    • 46049098822 scopus 로고    scopus 로고
    • Capacitive bulk acoustic wave silicon disk gyroscopes
    • H. Johari, F. Ayazi, "Capacitive Bulk Acoustic Wave Silicon Disk Gyroscopes," IEDM 2006, pp. 513-516.
    • (2006) IEDM , pp. 513-516
    • Johari, H.1    Ayazi, F.2
  • 13
    • 79951934427 scopus 로고    scopus 로고
    • Chip-scale IMU using folded-mems approach 2010
    • S. A. Zotov, et al., "Chip-scale IMU using folded-mems approach," 2010 IEEE Sensors, pp. 1043-1046.
    • IEEE Sensors , pp. 1043-1046
    • Zotov, S.A.1
  • 14
    • 0035368205 scopus 로고    scopus 로고
    • A HARPSS polysilicon vibrating ring gyroscope
    • F. Ayazi and K. Najafi, "A HARPSS polysilicon vibrating ring gyroscope," JMEMS, pp. 169-179, 2001.
    • (2001) JMEMS , pp. 169-179
    • Ayazi, F.1    Najafi, K.2
  • 15
    • 33847350160 scopus 로고    scopus 로고
    • Support loss in the radial bulk-mode vibrations of center-supported micromechanical disk resonators
    • Z. Hao and F. Ayazi, "Support loss in the radial bulk-mode vibrations of center-supported micromechanical disk resonators," Sensors and Actuators A: Physical, vol. 134, pp. 582-593, 2007.
    • (2007) Sensors and Actuators A: Physical , vol.134 , pp. 582-593
    • Hao, Z.1    Ayazi, F.2
  • 16
    • 51749100210 scopus 로고    scopus 로고
    • CMOS ASIC for MHz silicon BAW gyroscope
    • Seattle, WA
    • J. Shah, et al., "CMOS ASIC for MHz Silicon BAW Gyroscope," ISCAS 2008, Seattle, WA, pp. 2458-2461.
    • (2008) ISCAS , pp. 2458-2461
    • Shah, J.1
  • 17
    • 80052127170 scopus 로고    scopus 로고
    • http://www.qualtre.com
  • 18
    • 80052132575 scopus 로고    scopus 로고
    • A mode-matched 0.9MHz single proof-mass dual-axis gyroscope," in
    • Beijing, China
    • W. K. Sung, et al., "A mode-matched 0.9MHz single proof-mass dual-axis gyroscope," in Digest Tech. Papers, Transducers' 2011, Beijing, China 2011
    • (2011) Digest Tech. Papers, Transducers' , vol.2011
    • Sung, W.K.1
  • 19
    • 80052120136 scopus 로고    scopus 로고
    • Three-axis accelerometers
    • 189 B1, Aug. 25
    • M. Mehregany, "Three-Axis Accelerometers," US Patent 7,578,189 B1, Aug. 25, 2009.
    • (2009) US Patent 7 , vol.578
    • Mehregany, M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.