CMOS ASIC for MHz silicon BAW gyroscope

Proceedings - IEEE International Symposium on Circuits and Systems

Volumn , Issue , 2008, Pages 2458-2461

  Shah, Jalpa ^a   Johari, Houri ^a   Sharma, Ajit ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTICS; APPLICATION SPECIFIC INTEGRATED CIRCUITS; BANDPASS FILTERS; ELECTROSTATIC ACCELERATORS; ELECTROSTATIC ACTUATORS; SILICON; TECHNICAL PRESENTATIONS;

ELECTRO-MECHANICAL; ELECTROSTATIC ACTUATIONS; HIGH-QUALITY FACTORS; INTERNATIONAL SYMPOSIUM;

GYROSCOPES;

EID: 51749100210     PISSN: 02714310     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISCAS.2008.4541953     Document Type: Conference Paper

References (6)

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3. A. Sharma, M. Zaman, and F. Ayazi, "A 104-dB dynamic range transimpedance-based CMOS ASIC for tuning fork microgyroscopes," IEEE J. Solid-State Circuits, vol. 42, no. 8, pp. 1790-1802, Aug. 2007.
4. H. Johari, J. Shah and F. Ayazi, "High frequency XYZ-axis single-disk silicon gyroscope," Proc.. IEEE MEMS pp 856-859, Jan 2008.
5. W. A. Clark and R. T. Howe, "Surface micromachined Z axis vibratory rate gyroscope," in Proc. Solid State Sensors and Actuator Workshop 1996, pp. 283-287, Jan 2006.
6. C.T-C. Nguyen and R.T. Howe, "An integrated high-Q CMOS micromechanical resonator-oscillator," IEEE J. Solid-State Circuits, vol. 34, no. 4, pp. 440-455, April 1999.