Capacitive bulk acoustic wave silicon disk gyroscopes

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2006, Pages

  Johari, Houri ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BULK ACOUSTIC WAVE; FREQUENCY RANGING; HIGH-QUALITY FACTORS; INTERFACE CIRCUITS; LOW FREQUENCIES; LOW VACUUM; OPERATING VOLTAGES; STANDARD CMOS; STATIONARY DEVICES; VIBRATION AMPLITUDES; WAFER-SCALE PACKAGING;

ACOUSTIC WAVES; DISKS (STRUCTURAL COMPONENTS); ELASTIC WAVES; ELECTRON DEVICES; GYROSCOPES; LOGIC CIRCUITS; NONMETALS; SILICON; SILICON WAFERS; STANDARDS;

ACOUSTICS;

EID: 46049098822     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2006.346827     Document Type: Conference Paper

References (5)

1. M.F. Zaman, A. Sharma and F. Ayazi, "High Performance Matched-Mode Tuning Fork Gyroscope," Tech. Dig 19th IEEE International Conference on Micro-Electormechanical Systems Conference 2006 (MEMS 2006), Istanbul, Turkey, Jan. 2006, pp. 66-69.
2. F. Ayazi and K. Najafi, "A HARPSS Polysilicon Vibrating Ring Gyroscope," IEEE/ASME JMEMS, June 2001, pp. 169-179.
3. M. F. Zaman, A. Sharma, B. Amini, and F. Ayazi, "The Resonating Star Gyroscope," IEEE/ASME MEMS, 2005, pp. 355-358.
4. S. Lewis, et al, "Integrated sensor and electronics processing for >108 iMEMS inertial measurement unit components" IEDM 2003, pp. 39.1.1-4.
5. M. W. Judy, "Evolution of Integrated Inertial MEMS Technology," Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head Island, South Carolina, 2004, pp. 27-32.