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Volumn 64, Issue 3-4, 2002, Pages 191-198
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Tribological and surface characterisation in UHV of amorphous CNx films
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Author keywords
AES; Carbon nitride; Surface characterisation; Tribology; UHV tribometer; XPS
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Indexed keywords
AUGER ELECTRON SPECTROSCOPY;
CARBON NITRIDE;
COATING TECHNIQUES;
FRICTION;
SOLID LUBRICANTS;
SURFACE PROPERTIES;
THIN FILMS;
TRIBOLOGY;
X RAY PHOTOELECTRON SPECTROSCOPY;
THIN FILM COATINGS;
AMORPHOUS FILMS;
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EID: 0036135711
PISSN: 0042207X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0042-207X(01)00310-4 Document Type: Article |
Times cited : (23)
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References (14)
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