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Volumn 64, Issue 3-4, 2002, Pages 191-198

Tribological and surface characterisation in UHV of amorphous CNx films

Author keywords

AES; Carbon nitride; Surface characterisation; Tribology; UHV tribometer; XPS

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CARBON NITRIDE; COATING TECHNIQUES; FRICTION; SOLID LUBRICANTS; SURFACE PROPERTIES; THIN FILMS; TRIBOLOGY; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0036135711     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(01)00310-4     Document Type: Article
Times cited : (23)

References (14)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.