Multilayer thin-film inspection through measurements of reflection coefficients

Optics Letters

Volumn 36, Issue 16, 2011, Pages 3269-3271

  Wu, Kai ^a   Lee, Cheng Chung ^a   Brock, Neal J ^b   Kimbrough, Brad ^b  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

^b 4D Technology Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC AND MAGNETIC FIELDS; MEASUREMENT PRECISION; NORMAL INCIDENCE; PHASE ANALYSIS; REFLECTANCE ANALYSIS; REFLECTION COEFFICIENTS; REFRACTION INDEX; SPATIAL PATHS; SURFACE PROFILES; THIN-FILM STACKS;

MAGNETIC FIELDS; MULTILAYER FILMS; MULTILAYERS; REFLECTION; REFRACTION;

PHASE INTERFACES;

EID: 80051770724     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.36.003269     Document Type: Article

References (9)

1. K. P. Vitaly, F. V. Valery, and H. Vitali, Appl. Opt. 45, 4547 (2006).
2. S. W. Kim and G. H. Kim, Appl. Opt. 38, 5968 (1999).
3. D. S. Kim, S. H. Kim, H. J. Kong, and Y. W. Lee, Opt. Lett. 27, 1893 (2002).
4. Y. S. Ghim and S. W. Kim, Appl. Phys. Lett. 91, 091903 (2007).
5. Y. S. Ghim and S. W. Kim, Appl. Opt. 48, 799 (2009).
6. N. Brock, J.Hayes,B.Kimbrough,J. Millerd,M.North-Morris, M. Novak, and J. C. Wyant, Proc. SPIE 5875, 58750F (2005).
7. J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris, and J. C. Wyant, Proc. SPIE 5856, 14 (2005).
8. H. A. Macleod, Thin Film Optical Filters, 3rd ed. (Institute of Physics Publishing, 2001).
9. C. C. Lee, C. L. Tien, W. S. Sheu, and C. C. Jaing, Rev. Sci. Instrum. 72, 2128 (2001).