Modern approaches in phase measuring metrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5856 PART I, Issue , 2005, Pages 14-22

  Millerd, James ^a   Brock, Neal ^a   Hayes, John ^a   Kimbrough, Brad ^a   Novak, Matt ^a   North Morris, Michael ^a   Wyant, James C ^b  

^a 4D Technology Corporation   (United States)

^b UNIVERSITY OF ARIZONA   (United States)

Author keywords

Interferometry; Measurement; Metrology; Optical testing; Phase measurement

Indexed keywords

FREQUENCY ERRORS; MEASUREMENT ACCURACY; SINGLE-SHOT INTERFEROMETRY; VIBRATIONS;

ERROR ANALYSIS; MEASUREMENTS; OPTICAL TESTING; PHASE MEASUREMENT; PHASE SHIFT; SENSITIVITY ANALYSIS; TURBULENCE; VIBRATIONS (MECHANICAL);

INTERFEROMETRY;

EID: 28844453627     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.621581     Document Type: Conference Paper

References (9)

1. Creath, K., "Phase measurement interferometry techniques," Progress in Optics. 26 349-393 (1988).
2. Chris L. Koliopoulos, "Simultaneous phase-shift interferometer," in Advanced Optical Manufacturing and Testing II, Victor J. Doherty, ed., Proc. SPIE 1531, 119-127 (1992).
3. James E. Millerd and Neal J. Brock, "Methods and apparatus for splitting, imaging, and measuring wavefronts in interferometry," U. S. Patent 6,304,330 (2001).
4. James C. Wyant, Optics & Photonics News, 14, 4, 36-41 (2003).
5. M. Takeda, "Temporal versus spatial carrier techniques for heterodyne interferometry," in Proceedings, 14th congress of the international commission of optics: August 24-28, 1987, Henri Arsenault, ed., Proc. SPIE 813, 329-330 (1987).
6. D. M. Shough, O. Y. Kwon, and D. F. Leary, "High speed interferometric measurement of aerodynamic phenomena," in Propagation of high-energy laser beams through the earth's atmosphere, Peter B. Ulrich and Leroy E. Wilson, ed., Proc. SPIE, 1221, 394-403 (1990).
7. M. Küchel, "Methods and apparatus for phase evaluation of pattern images used in optical measurement," U.S. Patent 5,361,312 (1994).
8. S. Suja Helen, M.P. Kothiyal, and R.S. Sirohi, "Achromatic phase-shifting by a rotating polarizer", Opt. Comm. 154, 249 (1998).
9. Millerd, J.E., Brock, N.J., Hayes, J.B., North-Morris, M.B., Novak, M., and Wyant, J.C., "Pixelated phase-mask dynamic interferometer," Proc. SPIE, 5531, 304-314, (2004)