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Volumn 31, Issue 7, 2011, Pages 1372-1377

Optimal scheduling of semiconductor manufacture system based on improved Petri net model

Author keywords

GA; Multi phase optimal scheduling; Petri net model; Semiconductor manufacturing system

Indexed keywords

BOTTLENECK MACHINES; IMPROVED PETRI NET MODELS; MODEL-BASED OPC; OPTIMAL SCHEDULING; PETRI NET MODEL; PRODUCTION CYCLE; RESOURCES SCHEDULING; SEARCH EFFICIENCY; SEMICONDUCTOR MANUFACTURES; SEMICONDUCTOR MANUFACTURING SYSTEM; SEMICONDUCTOR MANUFACTURING SYSTEMS; SIMULATION EXPERIMENTS; UTILIZATION RATES;

EID: 80051553712     PISSN: 10006788     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (4)

References (12)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.