Performance analysis of cluster tool with non-revisiting in semiconductor manufacturing

Xitong Gongcheng Lilun yu Shijian/System Engineering Theory and Practice

Volumn 25, Issue 6, 2005, Pages 11-18

  Bai, Li Ping ^a   Wu, Nai Qi ^a  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Cluster tool; Modeling; Petri net; Process with non revisiting

Indexed keywords

EID: 21844466453     PISSN: 10006788     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (31)