Research of control and scheduling on semiconductor manufacturing line

Jisuanji Jicheng Zhizao Xitong/Computer Integrated Manufacturing Systems, CIMS

Volumn 8, Issue 8, 2002, Pages 607-611

  Wang, Zhong Jie ^a   Wu, Qi Di ^a  

^a TONGJI UNIVERSITY   (China)

Author keywords

Control and scheduling; Modeling; Reentrant line; Semiconductor manufacturing line

Indexed keywords

COMPUTER AIDED MANUFACTURING; CONTROL; MODELS; SCHEDULING;

CONTROL AND SCHEDULING; MODELING; REENTRANT LINE; SEMICONDUCTOR MANUFACTURING LINE;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0036704731     PISSN: 10065911     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (33)

1. WEIN L M. Scheduling semiconductor wafer fabrication[J]. IEEE Trans. Semiconductor Manufacturing, 1988, 1(3): 115-130.
2. KUMAR P R. Re-entrant lines[J]. Queueing Systems, 1993, 13(1-2): 87-110.
3. KUMAR P R. Scheduling semiconductor manufacturing plants[J]. IEEE Control System, 1994, 14(6): 33-40.
4. LITTLE J D. A proof for the queueing formula: n=λW[J]. Operations Research, 1961, 9(3): 383-387.
5. STIDHAM S. Operation control of admission to a queueing system[J]. IEEE Trans. Automatic Control, 1985, 30(8): 707-713.
6. BAI S, GERSUHWIN S B. Scheduling manufacturing system with work-in-process inventory control: single-part-type systems[J]. IIE Trans., 1995, 27(5): 599-617.
7. WEIN L M. Scheduling networks of queues: heavy traffic analysis of a two-station network with controllable inputs[J]. Operations Research, 1990, 38(6): 1065-1078.
8. GLASSEY R C, et al. Closed-loop job release control for VLSI circuit manufacturing[J]. IEEE Trans. Semiconductor Manufacturing, 1988, 1(1): 36-46.
9. FARGHER H E. A planning and scheduler for semiconductor manufacturing[J]. IEEE Trans. Semiconductor Manufacturing, 1994, 7(2): 117-126.
10. LI Shu, et al. Minimum inventory variability schedule with applications in semiconductor fabrication[J]. IEEE Trans. Semiconductor Manufacturing, 1996, 9(1): 145-149.
11. YEONG-DAE K, JUNG-UG K. Due date based scheduling and control policies in a multi-product semiconductor wafer fabrication facility[J]. IEEE Trans. Semiconductor Manufacturing, 1998, 11(1): 155-164.
12. LU STEVE C H, et al. Efficient scheduling policies to reduce mean and variance of cycle-time in semiconductor manufacturing plants [J]. IEEE Trans. Semiconductor Manufacturing, 1994, 7(3): 373-388.
13. HALL N G, SRISKANDAREJAH. A survey of machine scheduling problems with blocking and no-wait in process [J]. Operations Research, 1996, 44(3): 510-525.
14. KUBIAK W, LOW SHOLDON X C, et al. Mean flow time minimization in reentrant Job-shop with a hub[J]. Operations Research, 1996, 44(5): 764-776.
15. ABDALLAH I B. On deadlock free scheduling in FMS[A]. IEEE Proceedings on SMC[C]. Sa Diego, CA: IEEE, 1998. 366-371.
16. CAVALIERI S, GAIARDELLI P. Hybrid genetic algorithms for a multiple-objective scheduling problem[J]. Jour. Intelligent Manufacturing, 1998, 9(4): 361-367.
17. SCHORN-DISALVI E, LIQUIGAN R, PETERS B A, et al. Development of an intelligent scheduler for semiconductor manufacturing facilities[A]. Proceedings of the American Control Conference[C]. NJ, USA: IEEE 95CB35811, 1995. 159-165.
18. VARGAS-VILLAMIL F D, et al. Scheduling of reentrant manufacturing lines using a model predictive control (MPC) approach[A]. Proceedings of the American Control Conference[C]. NJ, USA: IEEE, 97CH36041. 1997. 1919-1923.
19. CAVALIERI S, MIRABELLA O. PN-based scheduler for a flexible semiconductor manufacturing system[A]. IEEE Symposium on Emerging Technologies and Factory Automation[C]. NJ, USA: IEEE, 1996. 724-729.
20. HARRISON J M, WEIN L M. Scheduling networks of queues: Heavy traffic analysis of a two-station closed network[J]. Operations Research, 1990, 38(6): 1052-1064.
21. SHARIFNIA A. Stability and performance of a simple distributed tracking policy for production control of manufacturing system[J]. IEEE Trans. Automatic Control, 1995, 40(6): 1109-1113.
22. NUETS M F. A general class of bulk queues with poisson input[J]. Ann Math. Statist, 1967, 38(3): 759-770.
23. FOWLER J W, PHILLIPS D, HOGG G. Real-time control of multi-product bulk-service semiconductor manufacturing processes[J]. IEEE Trans. Semiconductor Manufacturing, 1992, 5(2): 158-163.
24. CHEVALIER P B, WEIN L. Scheduling networks of queues: Heavy traffic analysis of a multistation closed network[J]. Operations Research, 1993, 41(4): 743-758.
25. ZHAO Lina. Scheduling optimization and performance analysis of reentrant line[D]. Beijing: Automation Research Institute of Chinese Academy of Sciences, 1999(in Chinese).
26. SHI Jinhui. Scheduling studies of semiconductor manufacturing line based on Petri nets[D]. Shanghai: Tongji University, 1999(in Chinese)
27. BASLETT F, CHANDY K M, MUNTZ R R. Open, closed and mixed networks of queues with different classes of customers[J]. Jour. ACM, 1975, 22(2): 248-260.
28. HUNG Y F, LEACHMAN R C. Reduced simulation models of wafer fabrication facilities[J]. Jour. ACM, 1975, 22(2): 248-260.
29. MICHAEL H, HARRISON J, VIEN N. Brownian models of multi-class queueing networks: Current status and open problems[J]. Queueing Systems, 1993, 13(1-2): 5-40.
30. CHEN Hong, DAVID D Y. Stable priority disciplines for multiclass networks, stochastic networks: Stability and rare events[M]. Springer Verlag: Paul Glasserman, 1996.
31. ZHOU M, JENG M.D. Modeling, analysis, simulation, scheduling, and control semiconductor manufacturing system: a Petri net approach[J]. IEEE Trans. Semiconductor Manufacturing, 1998, 12(1): 1-36.
32. CHEN R R, MEYN S P. Value iteration and optimization of multi-class queueing networks[J]. Queueing Systems, 1999, 32(1-3): 65-97.
33. DAI J G, WANG Y. Nonexistence of Brownian model of certain multi-class queueing networks[J]. Queueing Systems, 1993, 13(1-2): 41-46.