A liquid crystal polymer membrane MEMS sensor for flow rate and flow direction sensing applications

Journal of Micromechanics and Microengineering

Volumn 21, Issue 8, 2011, Pages

  Kottapalli, A G P ^a   Tan, C W ^a,b   Olfatnia, M ^a   Miao, J M ^a   Barbastathis, G ^b,c   Triantafyllou, M ^b,c  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b SINGAPORE MIT ALLIANCE FOR RESEARCH AND TECHNOLOGY   (Singapore)

^c Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR FLOW SENSORS; ATMOSPHERIC WINDS; AVERAGE ERRORS; CLINICAL DIAGNOSIS; EXPERIMENTAL TESTING; FLOW DIRECTION; FLOW PRESSURE; FLOW SENSING; HARSH ENVIRONMENT; LOW TEMPERATURES; MEMS SENSORS; NEAR-FIELD; OBJECT DETECTION; OPERATING RANGES; OTHER APPLICATIONS; PIEZO-RESISTORS; SENSING APPLICATIONS; UNDERWATER APPLICATION;

ATMOSPHERIC MOVEMENTS; DIAGNOSIS; FLOW RATE; FUNCTIONAL POLYMERS; GOLD COATINGS; LIQUID CRYSTALS; METAL CLADDING; MONITORING;

SENSORS;

EID: 80051529277     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/8/085006     Document Type: Article

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