Medium damping influences on the resonant frequency and quality factor of piezoelectric circular microdiaphragm sensors

Journal of Micromechanics and Microengineering

Volumn 21, Issue 4, 2011, Pages

  Olfatnia, M ^a   Shen, Z ^a   Miao, J M ^a   Ong, L S ^a   Xu, T ^a   Ebrahimi, M ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RADIATION; DYNAMIC BEHAVIORS; EXPERIMENTAL VALUES; GOOD CORRELATIONS; IN-VACUUM; MEMS FABRICATION; Q-FACTORS; Q-VALUES; QUALITY FACTORS; RADIUS-TO-THICKNESS RATIO; RESONANT FREQUENCIES; VISCOSITY DAMPING;

DAMPING; DIAPHRAGMS; ENERGY DISSIPATION; ETHANOL; FABRICATION; PIEZOELECTRICITY; Q FACTOR MEASUREMENT; SENSORS;

NATURAL FREQUENCIES;

EID: 79953646976     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/4/045002     Document Type: Article

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