A poly(vinylidene fluoride)-coated ZnO film bulk acoustic resonator for nerve gas detection

Journal of Micromechanics and Microengineering

Volumn 21, Issue 8, 2011, Pages

  Chen, Da ^a   Wang, Jingjing ^a   Li, Dehua ^a   Liu, Yijian ^a   Song, Hongwei ^a   Liu, Qixin ^a  

^a SHANDONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTES; FILM BULK ACOUSTIC RESONATORS; FREQUENCY SHIFT; GAS SENSITIVITY; LINEAR CORRELATION; NERVE GAS; ORDERS OF MAGNITUDE; PIEZOELECTRIC STACK; POLY(VINYLIDENE FLUORIDE); POLYVINYLIDENE FLUORIDES; SENSING COATING; SENSITIVE COATINGS; TESTING RESULTS; THIN FILM BULK ACOUSTIC RESONATOR; ZNO; ZNO FILMS;

ACOUSTIC EQUIPMENT; ACOUSTIC RESONATORS; COATINGS; QUARTZ; RESONATORS; SENSORS; ZINC OXIDE;

GASES;

EID: 80051517981     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/8/085017     Document Type: Article

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