Micromachined silicon and polymer probes integrated with film-bulkacoustic-resonator mass sensors

Journal of Micromechanics and Microengineering

Volumn 20, Issue 12, 2010, Pages

  Zhang, Hao ^a   Pang, Wei ^a   Kim, Eun Sok ^b   Yu, Hongyu ^c  

^a TIANJIN UNIVERSITY   (China)

^b University of Southern California ^*  (United States)

^c Arizona State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL PERFORMANCE; ENERGY LOSS; FABRICATION PROCESS; FILM-BULK-ACOUSTIC-RESONATOR; MASS SENSOR; MICRO-PROBES; MICROMACHINED PROBE; MICROMACHINED SILICON; QUALITY FACTORS; RESONANT MASS SENSORS; SILICON PROBE; SU-8 POLYMER MATERIALS;

ACOUSTIC SURFACE WAVE FILTERS; ELECTROMAGNETIC WAVES; ENERGY DISSIPATION; MERCURY (METAL); MICROMACHINING; PROBES; RESONATORS; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS;

SENSORS;

EID: 78649755359     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/12/125008     Document Type: Article

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