Synchrotron X-ray reflectivity for characterization of the initial ALD growth of TaN

Journal of the Korean Physical Society

Volumn 59, Issue 21, 2011, Pages 458-460

  Park, Yong Jun ^a   Lee, Dong Ryeol ^b   Baik, Sunggi ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

^b Soongsil University   (South Korea)

Author keywords

TaN ALD; X ray reflectivity

Indexed keywords

EID: 79961236470     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.59.458     Document Type: Article

References (17)

1. S. Q. Wang and J. W. Mayer, J. Appl. Phys. 64, 4711 (1988).
2. M-K. Song and S-W. Rhee, J. Electrochem. Soc. 155, H823 (2008).
3. J. Pan, C. Woo, M. Ngo, P. Besser, J. Pellerin, Q. Xiang and M. Lin, IEEE Trans. Electron Devices 24, 547 (2003).
4. J. K. Schaeffer, J. K. Schaeffer, C. Capasso, R. Gregory, D. Gilmer, L. R. C. Fonsa, M. Raymond, C. Happ, M. Kottke, S. B. Samavedam, P. J. Tobin and B. E. White, J. Appl. Phys. 101, 014503 (2007).
5. H. Kim, J. Vac. Sci. Technol., B 21, 2231 (2003).
6. J. W. Lim, H. S. Park and S. W. Kang, J. Appl. Phys. 88, 6327 (2000).
7. J. W. Lim, S. J. Yun and J. H. Lee, Electrochem. Solid-State Lett. 7, F73 (2004).
8. M. L. Green, M. Y. Ho, B. Busch, G. D. Wilk, T. Sorsch, T. Conard, B. Brijs, W. Vandervorst, P. I. Raisanen, D. Muller, M. Bude and J. Grazul, J. Appl. Phys. 92, 7168 (2002).
9. R. L. Puurunen et al., J. Appl. Phys. 96, 4878 (2004).
10. G. B. Rayner and S. M. George, J. Vac. Sci. Technol., A 27, 716 (2009).
11. K-S. Kim, M-S. Lee, S-S. Yim, H-M. Kim, K-B. Kim, H-S. Park, W. Koh, W-M. Li, M. Stokhof and H. Sprey, Appl. Phys. Lett. 89, 081913 (2006).
12. Y. J. Park, D. R. Lee, H. H. Lee, H-B-R. Lee, H. Kim, G-C. Park, S-W. Rhee and S. Baik, J. Nanosci. Nanotechnol. 11, 1577 (2011).
13. L. G. Parratt, Phys. Rev. B 95, 359 (1954).
14. L. Nevot and P. Croce, Rev. Phys. Appl. 15, 761 (1980).
15. J. S. Park, H. S. Park and S. W. Kang, J. Electrochem. Soc. 149, C28 (2002).
16. J-S. Lee, B. H. Seung, T-Y. Khim, H. Jang, K-T. Ko, BG. Park, J-H. Park, K-B. Lee and J-Y. Kim, J. Korean Phys. Soc. 52, 1814 (2008).
17. B-J. Park, S-Y. Rah, Y-J. Park and K-B. Lee, Rev. Sci. Instrum. 66, 1722 (1995).