High-performance lateral-actuating magnetic MEMS switch

Journal of Microelectromechanical Systems

Volumn 20, Issue 4, 2011, Pages 842-851

  Glickman, Michae ^a   Tseng, Peter ^b   Harrison, Jere ^b   Niblock, Trevor ^c   Goldberg, Ira B ^d   Judy, Jack W ^b  

^a Shocking Technologies Inc   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c Magzor Corporation   (United States)

^d CALIFORNIA LUTHERAN UNIVERSITY   (United States)

Author keywords

Electrodeposition; magnetic MEMS; MEMS switches; permalloy

Indexed keywords

ACTUATION VOLTAGES; CLOSING FORCE; FABRICATION TECHNOLOGIES; LOW TEMPERATURE PROCESSING; LOW VOLTAGES; MAGNETIC MEMS; MEMS SWITCHES; PERMALLOY; STEADY STATE;

FABRICATION; SUBSTRATES;

ELECTRIC SWITCHES;

EID: 79961210280     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2159096     Document Type: Article

References (30)

1. H. Lee, C. Leung, J. Shi, and S. Chang, "Electrostatically actuated copperblade microrelays," Sens. Actuators A, Phys., vol. 100, no. 1, pp. 105-113, Aug. 2002.
2. J. Wong, J. Lang, and M. Schmidt, "An electrostatically-actuated MEMS switch for power applications," in Proc. 13th Annu. Int. Conf. MEMS, 2000, pp. 633-638.
3. J. Qui, J. Lang, A. Slocum, and R. Strumpler, "A high-current electrothermal bistable MEMS relay," in Proc. IEEE 16th Annu. Int. Conf. MEMS, Kyoto, Japan, Jan. 19-23, 2003, pp. 64-67.
4. S. Fu, G. Ding, H. Wang, Z. Yang, and J. Feng, "Design and fabrication of a magnetic bi-stable electromagnetic MEMS relay," Microelectron. J., vol. 38, no. 4/5, pp. 556-563, Apr. 2007. (Pubitemid 46830794)
5. H. Hosaka, H. Kuwano, and K. Yanagiswa, "Electromagnetic microrelays: Concepts and fundamental characteristics," in Proc. IEEE MEMS-Investig. Micro Struct., Sens., Actuators, Mach. Syst., 1993, pp. 12-17.
6. W. Taylor, O. Brand, M. Allen, T. Relays, and C. Hawthorne, "Fully integrated magnetically actuated micromachined relays," J. Microelectromech. Syst., vol. 7, no. 2, pp. 181-191, Jun. 1998. (Pubitemid 128576337)
7. J. Wright and Y. Tai, "Magnetostatic MEMS relays for the miniaturization of brushless dc motor controllers," in Proc. 12th IEEE Int. Conf. MEMS, 1999, pp. 594-599.
8. M. Ruan, J. Shen, and C. Wheeler, "Latching microelectromagnetic relays," Sens. Actuators A, Phys., vol. 91, no. 3, pp. 346-350, Jul. 2001.
9. B. Rogge, J. Schulz, J. Mohr, A. Thommes, and W. Menz, "Fully batch fabricated magnetic microactuators using a two layer LIGA process," in Proc. CMOS-Compatible Back-End Process for In-plane Actuating Ferromagnetic MEMS, 1995, vol. 1, pp. 320-323.
10. G. Gray and P. Kohl, "Magnetically bistable actuator Part 1. Ultra-low switching energy and modeling," Sens. Actuators A, Phys., vol. 119, no. 2, pp. 489-501, Apr. 2005. (Pubitemid 40497195)
11. T.-H. Lin, S. Paul, S. Lu, and H. Lu, "A study on the performance and reliability of magnetostatic actuated RF MEMS switches," Microelectron. Reliab., vol. 49, no. 1, pp. 59-65, Jan. 2009.
12. R. Holm, Electric Contacts: Theory and Application. New York: Springer-Verlag, 1967.
13. M. Glickman, P. Tseng, J. Harrison, I. Goldberg, P. Johnson, T. Niblock, and J. Judy, "CMOS-compatible back-end process for in-plane actuating ferromagnetic MEMS," in Proc. Int. Conf. Solid-State Sens. Actuators, Transducers, Denver, CO, 2009, pp. 248-251.
14. M. Glickman, T. Niblock, J. Harrison, I. Goldberg, P. Tseng, and J. Judy, "High permeability Permalloy for MEMS," in Solid-State Sens. Actuator Workshop Tech. Dig., Hilton Head Island, SC, Jun. 6-10, 2010, pp. 328-331.
15. C. Ahn and M. Allen, "Micromachined planar inductors on silicon wafers for MEMS applications," IEEE Trans. Ind. Electron., vol. 45, no. 6, pp. 866-876, Dec. 1998. (Pubitemid 128740309)
16. X. Gao, Y. Cao, Y. Zhou, W. Ding, C. Lei, and J. Chen, "Fabrication of solenoid-type inductor with electroplated NiFe magnetic core," J. Magn. Magn. Mater., vol. 305, no. 1, pp. 207-211, Oct. 2006. (Pubitemid 43833202)
17. J. Park and M. Allen, "Ultralow-profile micromachined power inductors with highly laminated Ni/Fe cores: Application to low-megahertz dc-dc converters," IEEE Trans. Magn., vol. 39, no. 5, pp. 3184-3186, Sep. 2003.
18. N. Anderson and C. Grover Jr., "Electroplating of nickel-iron alloys for uniformity of nickel/iron ratio using a low density plating current," U.S. Patent 4 279 707, Jul. 21, 1981.
19. C. Liu, T. Tsao, Y. Tai, T. Leu, C. Ho, W. Tang, and D. Miu, "Out-ofplane Permalloymagnetic actuators for delta-wing control," in Proc. IEEE MEMS, 1995, pp. 7-12.
20. C. Ko, J. Yang, and J. Chiou, "Efficient magnetic microactuator with an enclosed magnetic core," J. Microlithography, Microfabrication, Microsyst., vol. 1, no. 2, p. 144, Jul. 2002.
21. C. Liu and Y. Yi, "Micromachined magnetic actuators using electroplated Permalloy," IEEE Trans. Magn., vol. 35, no. 3, pp. 1976-1985, May 1999.
22. R. Gupta, E. Hung, Y. Yang, G. Ananthasuresh, and S. Senturia, "Pull-in dynamics of electrostatically-actuated beams," in Proc. Solid-State Sens. Actuator Workshop, 1996, pp. 1-2.
23. Z. Wang, C. Wen, and D. Zhang, "Evaluation of Young's modulus and residual stress of NiFe film by microbridge testing," J. Mater. Sci. Technol., vol. 22, no. 3, pp. 345-348, 2006.
24. M. Glickman, "High-performance lateral-actuating magnetic MEMS switch," Ph.D. dissertation, Dept. Elect. Eng., Univ. California Los Angeles, Los Angeles, CA, 2010.
25. K. Binns and P. Lawrenson, Analysis and Computation of Electric and Magnetic Field Problems. New York: Pergamon, 1963.
26. A. Balakrishnan, W. Joines, and T. Wilson, "Air-gap reluctance and inductance calculations for magnetic circuits using a Schwarz-Christoffel transformation," IEEE Trans. Power Electron., vol. 12, no. 4, pp. 654-663, Jul. 1997. (Pubitemid 127763217)
27. J. Law, T. Busch, and T. Lipo, "Magnetic circuit modelling of the field regulated reluctance machine. Part I: Model development," IEEE Trans. Energy Convers., vol. 11, no. 1, pp. 49-55, Mar. 1996. (Pubitemid 126776186)
28. W. Young and R. Budynas, Roark's Formulas for Stress and Strain., 7th ed. New York: McGraw-Hill, 2001.
29. J. Ebel, D. Hyman, H. Newman, and A. Wright-Patterson, "RF MEMS testing-Beyond the S-parameters," IEEE Microw. Mag., vol. 8, no. 6, pp. 76-88, Dec. 2007. (Pubitemid 350295728)
30. J. Schimkat, "Contact materials for microrelays," in Proc. 11th Annu. Int. Workshop MEMS, 1998, pp. 190-194.