Characterization of the dip pen nanolithography process for nanomanufacturing

Journal of Manufacturing Science and Engineering

Volumn 133, Issue 4, 2011, Pages

  Saha, Sourabh K ^a   Culpepper, Martin L ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

DPN niche; DPN tool life; high throughput DPN; process driven system design; process limits

Indexed keywords

MANUFACTURE; NANOLITHOGRAPHY;

DPN NICHE; HIGH THROUGHPUT; PROCESS LIMITS; PROCESS-DRIVEN; TOOL LIFE;

THROUGHPUT;

EID: 79960903385     PISSN: 10871357     EISSN: 15288935     Source Type: Journal    
DOI: 10.1115/1.4004406     Document Type: Article

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